지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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Ternary B-C-N coatings were deposited on Si(100) wafer substrate from B₄C target by RF magnetron sputtering technique in Ar+N₂+CH₄ gas mixture. In this work, the effect of reactant gas ratio, CH₄/(N₂+CH₄) on the composition, kinds and amounts of bonding states comprising B-C-N coatings were investigated using two different bias power sources of continuous and unipolar DCs. In addition, the tribological properties of coatings were studied with the composition and bonding state of coating. It was found that the substrate bias power had an effect on chemical composition, and all of the obtained coatings were nearly amorphous. Main bonding states of coatings were revealed from FTIR analyses to be h-BN, C-C, C-N, and B-C. The amount of C-C bonging mainly increased with increase of the reactant gas ratio. From our studies, both C-C and h-BN bonding states improved the tribological properties but B-C one was found to be harmful on those. The best coating from tribological points of view was found to be BC<SUB>1.9</SUB>N<SUB>2.3</SUB> composition.
목차
Abstract
1. 서론
2. 실험 방법
3. 결과 및 고찰
4. 결론
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참고문헌
참고문헌 (43)
참고문헌 신청
1. [학술지(정기간행물)] - S. Ulrich / 1997 / / Surf. Coat. Technol. 97 (1) : 45 ~
2. [학술지(정기간행물)] - J. Robertson / 2002 / / Mater. Sci. Eng. R-Rep. 37 (4) : 129 ~
3. [학술지(정기간행물)] - P. B. Mirkarimi / 1997 / / Mater. Sci. Eng. R-Rep. 21 (2) : 47 ~
4. [학술지(정기간행물)] - J. Koskinen / 1996 / / Diam. Relat. Mat. 5 (6) : 669 ~
5. [학술지(정기간행물)] - H. S. Ahn / 2005 / / Wear 259 : 807 ~
2. [학술지(정기간행물)] - J. Robertson / 2002 / / Mater. Sci. Eng. R-Rep. 37 (4) : 129 ~
3. [학술지(정기간행물)] - P. B. Mirkarimi / 1997 / / Mater. Sci. Eng. R-Rep. 21 (2) : 47 ~
4. [학술지(정기간행물)] - J. Koskinen / 1996 / / Diam. Relat. Mat. 5 (6) : 669 ~
5. [학술지(정기간행물)] - H. S. Ahn / 2005 / / Wear 259 : 807 ~
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UCI(KEPA) : I410-ECN-0101-2012-581-004491166