Measurement of electron temperature and density of the coaxial focused plasma in accordance with insulator lengths for extreme ultraviolet (EUV) lithography

Young June Hong ,  Min Wug Moon ,  Gi Chung Kwon 외 4명

한국진공학회 학술발표회초록집

2008 .02

Extreme ultraviolet (EUV)measurement and Plasma diagnostics of the coaxial focused plasma in accordance with Argon pressure for EUV light source

Young June Hong ,  Gi Chung Kwon ,  Hee Myung Shin 외 1명

한국진공학회 학술발표회초록집

2008 .08

Measurement of EUV (Extreme Ultraviolet) and electron temperature in a hypocycloidal pinch device for EUV lithography

Sung Hee Lee ,  Young June Hong ,  Eun Ha Choi

한국진공학회 학술발표회초록집

2010 .08

Influence of Ne-Xe Gas Mixture Ratio on the Extreme Ultraviolet (EUV) Emission Measurement from the Coaxially Focused Plasma

Sung Hee Lee ,  Young June Hong ,  Duk In Choi 외 2명

한국진공학회 학술발표회초록집

2011 .02

Measurement of EUV Emission and its Plasma Parameters Generated from the Coaxial PlasmaFocus of Mather and Hypocycloidal Pinched Electrodes

Sunghee Lee ,  Kyung Ae Lee ,  Young June Hong 외 2명

한국진공학회 학술발표회초록집

2011 .08

Extreme Ultraviolet Plasma and its Emission Characteristics Generated from the Plasma Focus in Accordance with Gas Pressure for Biological Applications

Jin Han Kim ,  Jin Young Lee ,  Sung Hee Kim 외 1명

한국진공학회 학술발표회초록집

2013 .08

지구대기감시관측소에서의 최근 EUV-B 관측 결과

송병현 ,  홍기만 ,  최병철 외 1명

Asia-Pacific Journal of Atmospheric Sciences

2005 .06

극자외선(Extreme Ultraviolet) 발진을 위한 플라스마 집속장치에서의 Stark broadening을 이용한 전자온도 및 밀도진단

홍영준 ,  강민경 ,  권도연 외 3명

한국진공학회 학술발표회초록집

2009 .02

Characteristics of the Surface Erythemal Ultraviolet-B (EUV-B) Irradiance on Asian Dusts

Gi-Man Hong ,  Chun-Ho Cho

한국기상학회 학술대회 논문집

2006 .10

Measurement of Electron Temperature and Plasma Density in Coplanar AC Plasma Display Panels

I. R. Cho ,  M. W. Moon ,  C. G. Ryu 외 4명

한국진공학회 학술발표회초록집

2003 .02

Measurement of Electron Temperature and Plasma Density in Coplanar AC Plasma Display Panels

I. R. Cho ,  M. W. Moon ,  C. G. Ryu 외 4명

한국진공학회 학술발표회초록집

2003 .08

동축전극 구조의 플라스마 집속 장치의 Anode 전극 재질에 따른 EUV (Extreme Ultraviolet) intensity 측정

홍영준 ,  권도연 ,  윤은진 외 3명

한국진공학회 학술발표회초록집

2009 .08

Two - Dimensional Measurement of Electron Temperature and Plasma Density in coplanar AC Plasma Display Panel

M. W. Moon ,  I. R. Cho ,  W. B Pa 외 4명

한국진공학회 학술발표회초록집

2004 .02

Measurement of Electron Temperature and Number Density and Their Effects on Reactive Species Formation in a DC Underwater Capillary Discharge

Muhammad Waqa ,  Ahmed ,  Md. Shahinu 외 7명

Applied Science and Convergence Technology

2017 .09