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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한기계학회 Journal of Mechanical Science and Technology Journal of Mechanical Science and Technology Vol.21 No.12
- 발행연도
- 2007.12
- 수록면
- 2,149 - 2,158 (10page)
이용수
초록· 키워드
오류제보하기
Though compound semiconductor manufacturing technologies are very much similar to those of the silicon series memory devices, the production process control technologies tend to rely on the experiences of operators and managers because the production technology suitable for the characteristics of compound semiconductor fabrication has not yet been sufficiently developed, compared with that of silicon semiconductors. In addition, the semiconductor industry is being converted into mass customization production and an open foundry service for cooperation between businesses. In this study, a process data acquisition system suitable for compound semiconductors which collects data by operator input and equipment information extraction by using GEM was developed. The developed system was implemented in a real production system and compared with the conventional job card method. Through the application of the developed system, a foundation for constructing a real-time based MES (Manufacturing Execution System) was developed, with such expected effects as process information monitoring, meeting delivery schedule, and reducing lead-time.
목차
Abstract
1. Introduction
2. Compound semiconductor manufacturing process and foundry service
3. Process information acquisition system
4. Application on real fabrication
5. Conclusion
References
참고문헌 (20)
참고문헌 신청
1. [학술지(정기간행물)] - / 2006 / Historical review of compound semiconductor reliability 46 (8) : 1218 ~ 1227
2. [학술지(정기간행물)] - / 2006 / e-Service enhancement priority matrix 43 (5) : 572 ~ 586
3. [학술지(정기간행물)] - / 1997 / A respecification and extension of the DeLone and McLean model of IS success 8 (34) : 240 ~ 253
4. [학술지(정기간행물)] - / 1993 / Fab 6 pipeline constraint management implementation at Harris semiconductor corp.
5. [학술지(정기간행물)] - / 2007 / An intelligent multi-constraint finite capacity-based lot release system for semiconductor backend assembly environment 23 (3) : 326 ~ 338
2. [학술지(정기간행물)] - / 2006 / e-Service enhancement priority matrix 43 (5) : 572 ~ 586
3. [학술지(정기간행물)] - / 1997 / A respecification and extension of the DeLone and McLean model of IS success 8 (34) : 240 ~ 253
4. [학술지(정기간행물)] - / 1993 / Fab 6 pipeline constraint management implementation at Harris semiconductor corp.
5. [학술지(정기간행물)] - / 2007 / An intelligent multi-constraint finite capacity-based lot release system for semiconductor backend assembly environment 23 (3) : 326 ~ 338
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