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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2007.3
- 수록면
- 21 - 26 (6page)
이용수
초록· 키워드
오류제보하기
Si-based electromagnetic noise suppressors on coplanar waveguide transmission lines incorporated with a SiO₂ dielectric layer and a nanogranular Co-Fe-Al-O magnetic thin film are reported. Unlike glass-based devices, large signal attenuation is observed even in the bare structure without coating the magnetic thin film. Much larger signal attenuation is achieved in fully integrated devices. The transmission scattering parameter (S21) is as small as ?90 ㏈ at 20 ㎓ at the following device dimensions; the thicknesses of the SiO₂ and Co-Fe-Al-O thin films are 0.1 μm and 1 ㎛, respectively, the length of the transmission line is 15 mm, and the width of the magnetic thin film is 2000 ㎛. In all cases, the reflection scattering parameter (S₁₁) is below -10 ㏈ over the whole frequency band. Additional distributed capacitance formed by the Cu transmission line/SiO₂/Si substrate is responsible for these characteristics. It is considered that the present noise suppressors based on the Si substrate are a first important step to the realization of MMIC noise suppressors.
목차
1. Introduction
2. Experiments
3. Results and Discussion
4. Conclusions
Acknowledgments
References
참고문헌 (2)
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UCI(KEPA) : I410-ECN-0101-2009-428-016581487