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Dry etching of Al₂O3 thin films in inductively coupled plasma system
한국진공학회 학술발표회초록집
2016 .08
Inductively Coupled Plasma의 Numerical Simulation
한국진공학회 학술발표회초록집
1998 .07
Effects of the terminal capacitor on electron energy distribution function in a remote inductively coupled plasma
한국진공학회 학술발표회초록집
2020 .08
Analysis of chemical reactions of CF₄ and C₄F8 for inductively coupled plasma based on plasma parameters
한국진공학회 학술발표회초록집
2019 .08
Experimental investigation on plasma density distribution at a wafer-level in an inductively coupled plasma using multiple passive resonant antennas
한국진공학회 학술발표회초록집
2020 .08
Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System
한국진공학회 학술발표회초록집
2020 .08
Two - dimensional simulation of inductively coupled large - area plasma source
한국진공학회 학술발표회초록집
2002 .02
A Brief Review of Electron Kinetics in Radio-Frequency Plasmas
Applied Science and Convergence Technology
2019 .07
The electron cyclotron resonance (ECR) at various conditions in the inductively coupled plasma(ICP)
한국진공학회 학술발표회초록집
2002 .02
Study on the electrical and optical diagnosis of electron temperatures according to conditions of plasma emission light intensity in inductively coupled plasma
한국진공학회 학술발표회초록집
2016 .08
Effect of RF Bias on Plasma Parameters and Electron Energy Distribution in RF Biased Inductively Coupled Plasma
한국진공학회 학술발표회초록집
2012 .02
Investigation of effect of rf bias frequency on plasma parameters in a remote inductively coupled plasma
한국진공학회 학술발표회초록집
2018 .08
Heating Mode Transition in the Capacitive Mode of Inductively Coupled Plasma and the Electron Temperature Change During the E-H transition
한국진공학회 학술발표회초록집
2002 .06
Inductively Coupled Plasma 방전의 Global Modelling 과 Simulation
한국진공학회 학술발표회초록집
1997 .07
Interpretation of current decrease during E - H mode transition in a cylindrical inductively coupled plasma
한국진공학회 학술발표회초록집
2018 .08
Research on parallelization mechanism of inductively coupled plasma for large area plasma source
한국진공학회 학술발표회초록집
2016 .02
Plasma parameters variation in O₂ / He, Ar, Xe inductively coupled plasma as a function of mixing ratio
한국진공학회 학술발표회초록집
2001 .07
Investigation of Gas Injection Effect in Inductively Coupled Plasma with Fluorocarbon Plasma
한국진공학회 학술발표회초록집
2009 .02
Oxide 및 Nitride 고선택비 식각 공정에서의 CF4(CHF3)/O2/Ar inductively coupled pulsed plasmas
한국진공학회 학술발표회초록집
2020 .02
Characterization of inductively coupled Ar/CH4 plasma using tuned single langmuir probe and fluid simulation
한국진공학회 학술발표회초록집
2015 .08
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