목차

1. 서론 ································································································1
1.1. 연구 배경 ··················································································1
1.2. 나노공진기 구동 및 감지 회로에 대한 기존 연구 동향 ·····················3
1.3. 제안하는 저항 변화 나노공진기 센서 아날로그 프론트 엔드 ·············4
2. 나노공진기의 Butterworth Van-Dyke 등가회로 모델 ··································5
2.1. 기계적/전기적 등가 모델 ······························································5
2.2. 나노공진기의 병렬 기생 커패시턴스 영향 ·······································6
3. 개-루프 구조의 나노공진기 구동 및 감지 회로 설계 ······························8
3.1. 전체 회로도 ···············································································8
3.1.1. Differential amplifier ······························································10
3.1.2. 16-bit delta-sigma analog-to-digital converter ·································11
3.2. 제작 및 성능 평가 결과 ·····························································13
3.2.1. 나노공진기 센서 ·······························································13
3.2.2. 제작 결과 및 측정 환경 ·····················································14
3.2.3. 성능 평가 결과 ·································································16
4. PLL 기반의 나노공진기 구동 및 감지 회로 ··········································20
4.1. 전체 회로도 ··············································································20
4.1.1. Rail-to-rail folded cascode differential amplifier ······························21
4.1.2. Phase frequency detector ·························································22
4.2. 동작 원리 ················································································23
4.2.1. 자동 기생 커패시턴스 보상 모드 ·········································23
4.2.2. 자동 이득 조절 모드 ·························································26
4.3. 동작 검증 ·················································································28
4.3.1. 자동 기생 커패시턴스 보상 모드 ·········································28
4.3.2. 자동 이득 조절 모드 ·························································29
5. 결론 및 향후 연구 ···········································································32
5.1. 개-루프 구조의 나노공진기 구동 및 감지 회로 ······························32
5.2. PLL 기반의 나노공진기 구동 및 감지 회로 ····································33
참고문헌 ····························································································34
ABSTRACT ··························································································38