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논문 기본 정보
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- 학위논문
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- 2018
- 저작권
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We studied the characteristics of thermally deposited Sb-doped SnO2 (ATO) films with Ag-Ti alloyed interlayer to use as free of plasma damage and indium, thermally stable electrodes for enhancing performance heat generating and shielding films attachable on smart windows. By using multi-source thermal evaporation, without thermal annealing or intentional substrate heating, we deposited the ATO/Ag-Ti/ATO electrode on flexible PET according to thickness of each ATO layer. The thickness effects of ATO layer on the electrical and optical properties of ATO/Ag-Ti/ATO electrode was studied. In addition, using the figure of merits of the ATO/Ag-Ti/ATO electrode, we optimized the thickness of ATO layer. The optimized ATO/Ag-Ti/ATO electrode showed a sheet resistance of 6.91 Ohm/square and optical transmittance of 90.24% in spite of the room temperature process. Furthermore, we studied the mechanical properties of ATO/Ag-Ti/ATO electrode using various lab-designed bending test systems (Outer/Inner bending, twist test). Even at outer bending radius of 4 mm, the ATO film with Ag-Ti interlayer showed constant sheet resistance due to mechanical robust of Ag-Ti interlayer. The ATO/Ag-Ti/ATO electrode showed constant resistance even after annealing of 500 °C unlike Ag inserted ATO films. Furthermore, we demonstrated feasibility of the ATO/Ag-Ti/ATO films as transparent heat generating and shielding films for smart windows. Superior heat generation and blocking effect of ATO/Ag-Ti/ATO multilayer suggest that the multi-functional ATO/Ag-Ti/ATO multilayer can be applied to make energy-efficient smart windows for BEMS and automobiles.
목차
1. Introduction 11. 1. Overview of Transparent Conducting Electrodes (TCEs) 11. 1. 1. Electrical properties of TCEs 31. 1. 2. Optical properties of TCEs 41. 1. 3. Oxide/Metal/Oxide multilayer electrodes 61. 1. 4. Thermal evaporation system 81. 2. Overview of Transparent Flexible Thin Film Heaters (TFHs) 91. 3. Overview of Transparent Flexible Heat Shielding Films (HSFs) 122. Experiment 142. 1. Deposition of Transparent Conducting Electrodes using load-lock type thermal vaporation system 142. 1. 1. Deposition of Ag-alloy Semi-Transparent Electrodes 142. 1. 2. Deposition of ATO/Ag-Ti/ATO Multilayer Electodes 162. 2. Characteristic Evaluation of TCEs 182. 2. 1. Electrical properties analysis of TCEs 182. 2. 2. Opticla properties analysis of TCEs 212. 2. 3. Surface properties analysis of TCEs 222. 2. 4. Mechanical tests of TCEs 222. 3. Fabrication of Transparent Flexible Thin Film Heaters 223. Result and discussion 243. 1. Ag-alloy Electrodes 243. 1. 1. Motivation 243. 1. 2. Electrical properties of Ag-alloy Electrodes 243. 1. 3. Optical properties and figure of merit values of Ag-alloy Electrodes 273. 1. 4. Surface properties of Ag-alloy Electrodes 303. 1. 5. Mechanical properties of Ag-alloy Electrodes 343. 1. 6. Performance of the Semi-Transparent Flexible Thin Film Heater using Ag-Cu Electrodes 393. 1. 7. Performance of the Semi-Transparent Flexible Heat Shielding Film using Ag-Cu Electrodes 433. 2. ATO/Ag-alloy/ATO Multilayer Electrodes 443. 2. 1. Motivation 443. 2. 2. Electrical, optical properties and figure of merit values of ATO/Ag-Ti/ATO and ATO/Ag-Cu/ATO Multilayer Electrodes 453. 2. 3. Mechanical properties of ATO/Ag-Ti/ATO Multilayer Electrodes 523. 2. 4. Performance of the Transparent Flexible Thin Film Heater using ATO/Ag-Ti/ATO Multilayer Electrodes 563. 2. 5. Performance of the Transparent Flexible Heat Shielding Film using ATO Ag-Ti/ATO Multilayer Electrodes 614. Conclusion 645. Reference 65List of publication 67
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