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논문 기본 정보

자료유형
학위논문
저자정보

박윤종 (충남대학교, 忠南大學校 大學院)

지도교수
고형호
발행연도
2017
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충남대학교 논문은 저작권에 의해 보호받습니다.

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이 논문의 연구 히스토리 (2)

2017

연산증폭기 공유 기법을 이용한 저전력, 저잡음 용량형 센싱 집적회로
박윤종 전자전파정보통신공학과 2017.01 학위논문
증폭기 공유 기법을 이용한 저전력 저잡음 용량형 센서용 신호 처리 IC
박윤종 ,  김철영 ,  정방철 외 2명 센서학회지 2017.01 학술저널

초록· 키워드

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Capacitive sensing applications are widely used in numerous microsensors, including humidity, accelerometers, resonator sensors, touch sensors, comb sensors. However, gradually the various applications such portable devices, smart devices are smaller and required the low power and low noise characteristics. This paper presents a capacitive sensing IC using operational amplifier sharing technique with low-power and low-noise. The capacitive sensing amplifier (CSA) using opamp sharing technique is adjusted for the capacitive sensing IC required low power and low noise. The CSA operates the conventional CSA and PGA using the four different phases generated by timing generator. Also, correlated double sampling (CDS) is adopted to reduce the low-frequency noise, including the 1/f noise and dc offset. And then, serial peripheral interface (SPI) is also adopted to digitally control the circuit parameters including the output offset and gain. The IC is fabricated using 0.18 μm 1P6M CMOS process with an active area of 2.12 mm2. The power consumption is 1.02 mW from a 3.3V supply voltage. The input parasitic capacitances can be cancelled out automatically, and the required calibration time is lower than 4 ms. The input referred capacitance noise is 0.164 aFRMS with a bandwidth of 400 Hz. The capacitive sensitivity and linearity are 2.5 mV/fF, and 2.46 %FSO, respectively. The figure of merits (FoM) is 8.4.

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목차
1. 서론································································································1
2. 회로 설계·························································································5
2.1. 전체 회로 구성···········································································5
2.2. CSA AFE 회로의 원리···································································7
2.3. CSA readout 회로 설계··································································9
2.3.1. MEMS 센서모델링·····························································9
2.3.2. 증폭기 공유 기법이 적용된 CSA의 동작 설명·······················11
2.3.3. Fully differential amplifier with SC CMFB 설계·················14
2.3.4. Offset calibration loop ·················································16
2.3.5. 제안한 AFE IC의 simulation 결과·········································18
2.3.6. Serial Peripheral Interface (SPI) ·······························19
3. 제작 및 성능 평가 결과····································································21
3.1. 제작 결과·················································································21
3.2. 성능 평가 결과·········································································22
3.2.1. Programmable 소자에 따른 offset과 gain 측정····················22
3.2.2. 노이즈 측정과 입, 출력특성··············································24
3.2.3. 본 회로의 성능 분석·························································25
4. 결론 및 향후 연구···········································································27
참고문헌····························································································29
ABSTRACT·························································································31

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