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논문 기본 정보

자료유형
학위논문
저자정보

Hadi Teguh Yudistira (성균관대학교, 성균관대학교 일반대학원)

지도교수
변도영
발행연도
2014
저작권
성균관대학교 논문은 저작권에 의해 보호받습니다.

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이 논문의 연구 히스토리 (7)

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In this thesis, EHD jet printing is used as an alternative fabrication method in tera-hertz metamaterial. Tera-hertz metamaterial requires sub micron resolution of periodic structures. EHD jet printing may print fine line patterning until sub micron resolution. It may have many advantages, becauseit eliminates the need for physical masks, reduces the fabrication costs, enables the fabrication of complex geometry,enables for large area fabrication and offers easy multi-layer fabrication. The main issues in metamaterial fabrication process are large size fabrication, high cost, contamination of sample and time efficiency. EHD jet printing may solve these issues. An EHD jet printing can produce droplets much smaller than the size of the nozzle size and can use very small nozzle diameter size. This unique feature distinguishes EHD jet printing from conventional methods for sub-micron resolution printing.
This thesis aims to understand EHD jet printing mechanism, understand tera-hertz metamaterial application, fabricate and analyze performance tera-hertz metamaterial. There are two phenomenain EHD jet printing mechanism: flight charge droplet behavior and EHD line printing stability, which were observed in this thesis. Depending on the type of applied electric field and net electric charge density of the droplet and surrounding area, charge droplet can fly directly to the substrate, retract to the meniscus, deflect from the original vertical line, or reflect after coming very close to the substrate in a deflected route. EHD jet printing can reduce droplet volume up to 18 μm3. Reducing the droplet volume enhanced the line printing region of stability; and increasing the droplet volume reduced the line printing region of stability.Fabrication of tera-hertz metamaterial with high refractive index and high absorber tera-hertz metamaterial by using EHD jet printing was presented in this thesis. Comparison simulation result and experiment result was presented in this thesis for validation performance of sample. Droplet on Demand (DoD) EHD jet printing was applied in fabrication process. To get DoD EHD jet printing, pulse DC signal was applied in EHD jet printing system. The peak of high refractive index value was achieved around 18.4 and 25.7 for single layer and multi layer tera-hertz metamaterial with high refractive index, respectively. The perfect absorber tera-hertz metamaterial samples which were fabricated by using EHD jet printing have good performance. The absorption achieved more than 99 %.

목차

Chapter1. Introduction 1
1.1 Pattern Transfer Technology . 1
1.2 Inkjet Printing . 2
1.3 Electrohydrodynamic (EHD) Jet Printing . 6
1.4 Mechanism of Electrohydrodynamic Jet Printing . 8
1.5 EHD Jet Mode . 10
1.6 Inkjet Printing Fabrication Performance . 13
1.7 Introduction Metamaterial . 16
1.8 Maxwells Equation, Field and Potential 18
1.9 Dielectric Properties 21
1.10 Metal Properties 22
1.11 Fabrication of Metamaterial 24
1.11.1 Photolithography 25
1.11.2 Electron Beam Lithography . 29
1.12 Objectives of Thesis 31
Chapter 2. Charge Droplet Flight Behavior in EHD Jet Printing . 34
2.1 Introduction . 34
2.2 Experiment Set Up 35
2.3 Results and Discussion 36
2.4 Retreat Behavior of a Charged Droplet for Electrohydrodynamic Jet Printing 43
2.5 Summary . 55
Chapter 3. Stability Enhancement in Electrohydrodynamics (EHD) Line Printing . 57
3.1 Introduction . 57
3.2 Experiment Set up . 59
3.3 Results and Discussion 62
3.4 Printed Line Stability 68
3.6 Summary . 79
Chpater 4. Fabrication of Tera-hertz Metamaterial with High Refractive Index 80
4.1 Single Layer Metamaterial with High Refractive Index . 80
4.1.1 Introduction . 80
4.1.2 Design and Fabrication Process 82
4.1.3 Experiment Set Up 85
4.2 Tera-hertz Time-Domain Spectroscopy (THz-TDS) 88
4.3 Retrieval Method for Extraction of Material Parameter . 91
4.4 Single Layer Metamaterial with High Refractive Index Result 94
4.5 Three-dimensional Multilayer Metamaterial with High Refractive Index 101
4.5.1 Introduction . 101
4.5.2 Geometry of Multilayer Metamaterial . 104
4.5.3 Fabrication Process 106
4.6 Three-dimensional Multilayer Metamaterial with High Refractive Index Result. 109
4.7 Summary . 117
Chapter 5. Fabrication of Star-shaped Perfect Absorber 118
5.1 Introduction . 118
5.2 Geometry of metamaterial . 120
5.3 Fabrication Process . 122
5.4 Results and Discussion 125
5.5 Summary . 132
Chapter 6. Conclusions . 133
Apendix A. Simulation Metamaterial . 142
A.1 Finite Integration Technique (FIT). 142
A.2 Solver Function 145
A.2.1 Transient Solver 145
A.2.2 Frequency Domain Solver . 147
A.2.3 Eigenmode Solver . 147
A.3 Mesh Generation 147
References 136

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