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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학위논문
- 저자정보
- 지도교수
- 조영래
- 발행연도
- 2014
- 저작권
- 부산대학교 논문은 저작권에 의해 보호받습니다.
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In this work, effect of surface modification on surface energy and adhesion strength was investigated. Soda-lime glass, Si-wafer and ITO (Indium Tin Oxide) substrates have been exposed to atmospheric plasma to increase surface energy. Surface energy values for the surface modified substrates have been monitored by wetting angle of liquid on samples. For the test liquids, deionized water and diiodo-methane were used. The shapes of wetting angle demonstrated hydrophilic properties. The surface energy was increased linearly and reached a maximum value of 76 mJ/m² by surface modification.
Adhesion strength of sputtered chromium (Cr) coating on substrates was researched using scratch test. It was found that the increase in surface energy mainly depends on the increase in oxygen-containing groups in the interface of thin film on the substrates. As surface energy increased, adhesion strength increased proportionately. When the samples are leaved in vacuum chamber, the increased surface energy was decreased slowly. Smaller than 5% of decrease in the surface energy was observed when the substrates are exposed 2 hr in the air atmosphere . To analyze the correlation between surface energy and adhesion strength, microstructure of thin film in early stage was observed by high resolution SEM. The shape of thin film was similar to hydrophilic and grow almost two-dimensionally by plasma surface treatment. From this study, we found that the adhesion strength of the plasma surface modified substrates increased compared to untreated substrate surface. The technology of atmospheric plasma surface modification for substrates can be used in improvement of adhesion strength between
sputtered Cr coating on different substrates.
Adhesion strength of sputtered chromium (Cr) coating on substrates was researched using scratch test. It was found that the increase in surface energy mainly depends on the increase in oxygen-containing groups in the interface of thin film on the substrates. As surface energy increased, adhesion strength increased proportionately. When the samples are leaved in vacuum chamber, the increased surface energy was decreased slowly. Smaller than 5% of decrease in the surface energy was observed when the substrates are exposed 2 hr in the air atmosphere . To analyze the correlation between surface energy and adhesion strength, microstructure of thin film in early stage was observed by high resolution SEM. The shape of thin film was similar to hydrophilic and grow almost two-dimensionally by plasma surface treatment. From this study, we found that the adhesion strength of the plasma surface modified substrates increased compared to untreated substrate surface. The technology of atmospheric plasma surface modification for substrates can be used in improvement of adhesion strength between
sputtered Cr coating on different substrates.
목차
제 1 장 서 론 1제 2 장 이론적 배경 32.1. 표면 장력 32.1.1. 표면 장력의 원리 42.1.2. 물체가 표면 장력에의해서 뜨는 원리 72.1.3. 표면 장력 측정 방법 102.2. 표면에너지 142.2.1. 젖음(wetting) 152.2.2. 접촉각(contact angle) 202.2.3. 표면에너지 계산 방법 23제 3 장 실험 방법 253.1. 시편 준비와 플라즈마 표면처리 273.1.1. 플라즈마 표면처리에 따른 접촉각 및 표면에너지 측정 273.1.2. 스퍼터링을 이용한 크롬(Cr) 박막 코팅 방법과 두께 측정 303.1.3. 부착력(adhesion strength) 측정 방법 313.2. 특성 평가 323.2.1. 표면처리 시간에 따른 접촉각 및 표면에너지 변화 특성 323.2.2. 표면처리 시간에 따른 부착력 변화 특성 333.2.3. 표면처리에 따른 ITO/Cr 계면의 결합 특성 34제 4 장 실험결과 및 고찰 354.1. 플라즈마 표면처리 시간에 따른 접촉각 및 표면에너지 특성 354.1.1. 플라즈마 표면처리 시간에 따른 접촉각 감소 현상 354.1.2. 플라즈마 표면처리 시간에 따른 표면에너지 증가 현상 394.2. 플라즈마 표면처리에 따른 부착력 특성 484.2.1. 광학현미경을 통한 박리 부분 관찰 484.2.2. 스크래치 테스트를 통한 부착력 평가 524.3. 플라즈마 표면처리에 따른 Cr 박막 형상 분석 574.3.1. 주사전자현미경을 이용한 박막 단면 분석 574.4. 플라즈마 표면처리에 따른 Cr 박막 XPS 분석 604.4.1. XPS를 이용한 박막과 기판의 화학적 결합 분석 60제 5 장 결론 62참고문헌 64Abstract 66
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