지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학위논문
- 저자정보
- 지도교수
- 김민영
- 발행연도
- 2013
- 저작권
- 경북대학교 논문은 저작권에 의해 보호받습니다.
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초록· 키워드
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This thesis proposes A parallel mode confocal system using micro-lens and pinhole array in dual microscope configuration.
The three-dimensional measurement method of confocal system is a spot scanning method which has high resolution and good illumination efficiency. But the conventional confocal system had a weak point that it has to do xy axis scanning to achieve field of view(FOV) vision through spot scanning. There are some methods to improve this by using galvano mirror, pin-hole array, etc.
Therefore in this proposes we propose a method to improve a parallel mode confocal system using micro-lens and pin-hole array in dual microscope configuration.
We made area scan possible by using a combination micro lens array (MLA) and pin-hole array, and used objective lens to improve light transmittance and signal-to-noise ratio. Additionally we made it possible to change the objective lense so that it is capable to select a lens considering the reflection characteristic of the measuring object and proper magnification. We did experiment using 5X, 2.3X objective lens, and did calibration of height using VLSI calibration target.
The three-dimensional measurement method of confocal system is a spot scanning method which has high resolution and good illumination efficiency. But the conventional confocal system had a weak point that it has to do xy axis scanning to achieve field of view(FOV) vision through spot scanning. There are some methods to improve this by using galvano mirror, pin-hole array, etc.
Therefore in this proposes we propose a method to improve a parallel mode confocal system using micro-lens and pin-hole array in dual microscope configuration.
We made area scan possible by using a combination micro lens array (MLA) and pin-hole array, and used objective lens to improve light transmittance and signal-to-noise ratio. Additionally we made it possible to change the objective lense so that it is capable to select a lens considering the reflection characteristic of the measuring object and proper magnification. We did experiment using 5X, 2.3X objective lens, and did calibration of height using VLSI calibration target.
목차
1. 서론1.1 연구 배경1.2 연구 내용1.3 논문 구성2. 이차 현미경 구조의 병렬 공초점 시스템2.1 조명 광학계 구성2.2 micro lens array 와 pinhole array 구성2.3 시스템 구성3. 고속 측정 알고리즘3.1 피크 검출 알고리즘3.2 CUDA를 이용한 병렬 고속화4. 실험 및 결과분석4.1 제안된 공초점 현미경 시스템4.2 정확도 및 반복도 실험4.3 실험 결과 분석5.결론 및 향후 계획6.참고 문헌7.영문 초록
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