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Subject

Large Piezoelectric Coefficient of high Quality Mn-doped (K 0.5 Na 0.5 )NbO3 Thick film by Using a Laser Doppler Vibrometer
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Type
Academic journal
Author
Hae Jin Seog (University of Ulsan) Bong Chan Park (University of Ulsan) Shinuk Cho (University of Ulsan) Tae Heon Kim (University of Ulsan) Ill Won Kim (University of Ulsan) Aman Ullah (University of Ulsan)
Journal
The Korean Physical Society New Physics: Sae Mulli Vol.70 No.3 KCI Accredited Journals SCOPUS
Published
2020.3
Pages
220 - 225 (6page)

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Large Piezoelectric Coefficient of high Quality Mn-doped (K 0.5 Na 0.5 )NbO3 Thick film by Using a Laser Doppler Vibrometer
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Abstract· Keywords

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The development of lead-free ferroelectric and piezoelectric materials is required from the view point of environmental preservation. Among various lead-free materials, (K<sub>0.5</sub>Na<sub>0.5</sub>)NbO<sub>3</sub> (KNN) has attracted much attention due to its excellent ferroelectric and piezoelectric properties. In this study, high-quality Mn-doped (K<sub>0.5</sub>Na<sub>0.5</sub>)NbO<sub>3</sub> (KNMN) films were deposited on Pt/TiO<sub>2</sub>/SiO<sub>2</sub>/Si substrates by using the sol-gel method. For various numbers of coating cycles; the KNMN films have thicknesses of around 0.8, 1.0, 1.5 and 2.0 μm, respectively. The effective piezoelectric coeffi- cient (d<sub>33,eff</sub>) of the KNMN films was analyzed using a home-made laser Doppler vibrometer that could measure large millimeter-scale areas. The average d<sub>33,eff</sub> of a 2-μm-thick KNMN film was measured to be around 120 pm/V, which is comparable to those of lead-based materials and higher than those of other lead-free piezoelectric film alternatives.

Contents

I. Introduction
II. Experimental details
III. Results and discussion
IV. Conclusion
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