지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2024.12
- 수록면
- 145 - 156 (12page)
이용수
초록· 키워드
오류제보하기
Electronic printing processes are gaining attention as next-generation eco-friendly patterning processes that can replace conventional patterning processes in semiconductor manufacturing that cause harmful problems and large amounts of pollutants. In the formation of patterned thin films by the electronic printing process, the unevenness of the film caused by the coffee ring effect, affects the performance of the device, and requires the identification of a process method for uniform film formation. In this study, Ag ink was printed with a dispenser to form an electrical line, and a thin film was formed by splitting the solvent drying temperature for 5 min and the ambient heat treatment conditions for 5 min. The uniformity of the thin film was analyzed, and the voltage-heat generation characteristics of the electric line and the shape retention ability of the thin film in a high-temperature environment were examined according to the uniformity of the thin film. Vacuum-annealing could create a uniform thin film. When evaluating the heat generation characteristics using a maximum applied voltage of 5V, the electrical conduction for a uniform thin film showed 83.1°C, whereas the coffee ring effect caused the electrical conduction for a non-uniform thin film to show 105°C heat generation. This showed that electrical conduction with a uniform thin film resulted in a 26% reduction in heat generation characteristics. In addition, it was confirmed that the printed electrical line with a uniform thin film had little change in shape at high temperatures. This confirms that a uniform thin film can suppress the heat generation of the conductor and cause little deformation in high-temperature environments, so it can be used in various environments.
목차
Abstract
1. 서론
2. 실험
3. 결과 및 토의
4. 결론
REFERENCES
참고문헌 (29)
참고문헌 신청
Park, D. U., Byun, H. J., Choi, S. J., Jeong, J. Y., Kim, C. N., Ha, K. C., and Park, D. Y., Review on Potential Risk Factors in Wafer Fabrication Process of Semiconductor Industry, Korean Journal of Occupational and Environmental Medicine, Vol. 23, No. 3, pp. 333-342, 2011, https://doi.org/10.35371/kjoem.2011.23.3.333.
Lee, I. J., Yoon, W. H., Jeong, G. J., and Cho, S. J., Distribution and Risk Assessment of Perfluoroalkyl and Polyfluoroalkyl Substances (PFAS) in the South Han River, Journal of Environmental Analysis, Health and Toxicology, Vol. 27, No. 1, pp. 29-38, 2024, https://doi.org/10.36278/jeaht.27.1.29.
Huang, S. Z. and Wu. K. Y., Health Risk Assessment of Photoresists Used in an Optoelectronic Semiconductor Factory, Risk Analysis, Vol. 39, No. 12, pp. 2625-2639, 2019, https://doi.org/10.1111/risa.13366.
Eom, Y. S., Hong, J. H., Lee, S. J., Lee, E. J., Cha, J. S., Lee, D. G., and Bang, S. A., Emission Factors of Air Toxics from Semiconductor Manufacturing in Korea, Journal of the Air & Waste Management Association, Vol. 56, No. 11, pp. 1518-1524, 2006, https://doi.org/10.1080/10473289.2006.10464556.
Seo, S., Park, Y., Na, S., Lee, J., Lee, W., and Kim, M., Global Performance, Trends, and Challenges for Assessment and Management of Per- and Polyfluoroalkyl Substances (PFASs): A Critical Review, Journal of Environmental Analysis, Health and Toxicology, Vol. 27, No. 1, pp. 1-13, 2024, https://doi.org/10.36278/jeaht.27.1.1.
Lee, I. J., Yoon, W. H., Jeong, G. J., and Cho, S. J., Distribution and Risk Assessment of Perfluoroalkyl and Polyfluoroalkyl Substances (PFAS) in the South Han River, Journal of Environmental Analysis, Health and Toxicology, Vol. 27, No. 1, pp. 29-38, 2024, https://doi.org/10.36278/jeaht.27.1.29.
Huang, S. Z. and Wu. K. Y., Health Risk Assessment of Photoresists Used in an Optoelectronic Semiconductor Factory, Risk Analysis, Vol. 39, No. 12, pp. 2625-2639, 2019, https://doi.org/10.1111/risa.13366.
Eom, Y. S., Hong, J. H., Lee, S. J., Lee, E. J., Cha, J. S., Lee, D. G., and Bang, S. A., Emission Factors of Air Toxics from Semiconductor Manufacturing in Korea, Journal of the Air & Waste Management Association, Vol. 56, No. 11, pp. 1518-1524, 2006, https://doi.org/10.1080/10473289.2006.10464556.
Seo, S., Park, Y., Na, S., Lee, J., Lee, W., and Kim, M., Global Performance, Trends, and Challenges for Assessment and Management of Per- and Polyfluoroalkyl Substances (PFASs): A Critical Review, Journal of Environmental Analysis, Health and Toxicology, Vol. 27, No. 1, pp. 1-13, 2024, https://doi.org/10.36278/jeaht.27.1.1.
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