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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2023.12
- 수록면
- 393 - 398 (6page)
- DOI
- 10.14773/cst.2023.22.6.393
이용수
이 논문의 연구 히스토리 (3)
2023
Microstructures and Mechanical Properties of HfN Coatings Deposited by DC, Mid-Frequency, and ICP Magnetron Sputtering
Sung-Yong Chun
Corrosion Science and Technology
2023.12
학술저널
Microstructure and Mechanical Properties of HfN Coatings Deposited by Dc, Mid-frequency and ICP Magnetron Sputtering
Sung-Yong Chun
한국표면공학회 학술발표회 초록집
2023.11
학술대회자료
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초록· 키워드
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Properties of hafnium nitride (HfN) coatings are affected by deposition conditions, most often by the sputtering technique. Appropriate use of different magnetron sputtering modes allows control of the structural development of the film, thereby enabling adjustment of its properties. This study compared properties of HfN coatings deposited by direct current magnetron sputtering (dcMS), mid-frequency direct current magnetron sputtering (mfMS), and inductively coupled plasma-assisted magnetron sputtering (ICPMS) systems. The microstructure, crystalline, and mechanical properties of these HfN coatings were investigated by field emission electron microscopy, X-ray diffraction, atomic force microscopy, and nanoindentation measurements. HfN coatings deposited using ICPMS showed smooth and highly dense microstructures, whereas those deposited by dcMS showed rough and columnar structures. Crystalline structures of HfN coatings deposited using ICPMS showed a single δ-HfN phase, whereas those deposited using dcMS andmfMS showed a mixed δ-HfN and HfN 0.4phases. Their performance were increased in the order of dcMS < mfMS < ICPMS, with ICPMS achieving a value of 47.0 GPa, surpassing previously reported results.
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