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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- Korean Society for Precision Engineering Journal of the Korean Society for Precision Engineering Journal of the Korean Society for Precision Engineering Vol.41 No.3
- 발행연도
- 2024.3
- 수록면
- 183 - 189 (7page)
- DOI
- 10.7736/JKSPE.023.125
이용수
초록· 키워드
오류제보하기
The elastic property of a copper (Cu) thin film was investigated using the surface acoustic wave (SAW) measurement technique. The Cu film was deposited on a quartz substrate using a direct current magnetron sputter and its surface morphology was inspected using atomic force microscopy. Time-domain waveforms of the SAW on the film were acquired at different propagation distances to estimate the Young’s modulus of Cu such that the experimentally-obtained dispersion curve can be compared to the analytical result calculated using the Transfer Matrix method for curve-fitting. Results showed that the film’s elastic property value decreased by 18.5% compared to that of the bulk state, and the scale effect was not significant in the thickness range of 150-300 nm, showing good agreement with those by the nanoindentation technique. The property, however, increased by 15.5% with the grain coarsening.
목차
1. 서론
2. 이론 및 해석
3. 실험
4. 실험결과 및 토의
5. 결론
REFERENCES
참고문헌 (17)
참고문헌 신청
Cai, W., Zhang, B., Zheng, K., Wu, Y., Zhang, Y., (2020), A novel method for detecting characteristic parameters of coating layers by ultrasonic surface wave technique, IEEE Access, 9, 6379-6387.
Grünwald, E., Nuster, R., Treml, R., Kiener, D., Paltauf, G., Brunner, R., (2015), Young's modulus and Poisson's ratio characterization of tungsten thin films via laser ultrasound, Materials Today: Proceedings, 2(8), 4289-4294.
Sherman, B., Liou, H.-C., Balogun, O., (2015), Thin film interface stresses produced by high amplitude laser generated surface acoustic waves, Journal of Applied Physics, 118(13), 1-10.
Kudělka, R., Václavek, L., Tomáštík, J., Malecová, S., Čtvrtlík, R., (2020), Laser-induced surface acoustic waves for thin film characterization, Acta Polytechnica CTU Proceedings, 27, 57-61.
Cao, Z., Li, P., Lu, H., Huang, Y., Meng, X., (2009), Thickness and grain size dependent mechanical properties of Cu films studied by nanoindentation tests, Journal of Physics D: Applied Physics, 42(6), 065405.
Grünwald, E., Nuster, R., Treml, R., Kiener, D., Paltauf, G., Brunner, R., (2015), Young's modulus and Poisson's ratio characterization of tungsten thin films via laser ultrasound, Materials Today: Proceedings, 2(8), 4289-4294.
Sherman, B., Liou, H.-C., Balogun, O., (2015), Thin film interface stresses produced by high amplitude laser generated surface acoustic waves, Journal of Applied Physics, 118(13), 1-10.
Kudělka, R., Václavek, L., Tomáštík, J., Malecová, S., Čtvrtlík, R., (2020), Laser-induced surface acoustic waves for thin film characterization, Acta Polytechnica CTU Proceedings, 27, 57-61.
Cao, Z., Li, P., Lu, H., Huang, Y., Meng, X., (2009), Thickness and grain size dependent mechanical properties of Cu films studied by nanoindentation tests, Journal of Physics D: Applied Physics, 42(6), 065405.
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