지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2023.11
- 수록면
- 269 - 272 (4page)
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초록· 키워드
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Failure to perform proper maintenance on chemical tanks that store chemicals for semiconductor processes can cause serious problems such as container damage and drug leakage due to aging, which can increase the probability of accidents such as fires, explosions and environmental pollution and increase human and material damage. In order to prevent this risk in advance, it is necessary to diagnose the aging of the chemical tank and properly manage it. In this paper, the cost and time were reduced by proposing efficient selection criteria for chemical tanks subject to aging diagnosis so that only about 12% of tanks that were actually aging could be diagnosed, and by conducting aging diagnosis based on the proposed criteria, metal contamination caused by drug leakage and lining corrosion that were not previously found was found, and immediate use was prohibited and reinforced to prevent accidents such as environmental pollution.
목차
Abstract
Ⅰ. 서론
Ⅱ. 본론
Ⅲ. 결론 및 향후 연구 방향
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