지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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To fabricate large-area graphene transistors, the transfer of chemical vapor-deposited grapheme onto preferred substrates and the patterning of drain/source electrodes are necessary. However, these transfer and deposition processes commonly employ polymers such as poly(methyl methacrylate) and photoresists, which can leave residual polymers and adsorbed molecules on the channel, thus affecting the electrical properties of the devices. In this study, we investigated the effects of heat treatment on the device characteristics related to the polymer residues and adsorbates on graphene surface by analyzing the transfer curves. Our findings demonstrate that proper vacuum annealing can enhance the device’s performance and reduce contact resistance. Moreover, we propose an advanced procedure that incorporates thermal annealing under vacuum after each step of polymer removal. This method is particularly beneficial for enhancing the contact and surface properties of channels in general fabrication processes involving polymers.
목차
I. INTRODUCTION
II. EXPERIMENTAL METHODS
III. DISCUSSION
IV. CONCLUSION
REFERENCES
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