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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2018.2
- 수록면
- 69 - 78 (10page)
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This paper presents a precise edge detection algorithm for the critical dimension (CD) measurement of a Thin-Film Transistor Liquid-Crystal Display (TFT-LCD) pattern. The sigmoid surface function is proposed to model the blurred step edge. This model can simultaneously find the position and geometry of the edge precisely. The nonlinear least squares fitting method (Levenberg-Marquardt method) is used to model the image intensity distribution into the proposed sigmoid blurred edge model. The suggested algorithm is verified by comparing the CD measurement repeatability from high-magnified blurry and noisy TFT-LCD images with those from the previous Laplacian of Gaussian (LoG) based sub-pixel edge detection algorithm [1] and error function fitting method [7]. The proposed fitting-based edge detection algorithm produces more precise results than the previous method. The suggested algorithm can be applied to in-line precision CD measurement for high-resolution display devices.
목차
I. INTRODUCTION
II. BLURRED EDGE MODELING BY SIGMOID FUNCTION
III. EXPERIMENT AND REULTS
IV. CONCLUSION
REFERENCES
참고문헌 (16)
참고문헌 신청
박성훈 / 2013 / In-line Critical Dimension Measurement System Development of LCD Pattern Proposed by Newly Developed Edge Detection Algorithm / Current Optics and Photonics 17(5):392~398
Nam-Thai Doan / 2012 / A Fast Image Enhancement Technique Using a New Scanning Path for Critical Dimension Measurement of Glass Panels / International Journal of Precision Engineering and Manufacturing 13(12):2109~2114
N. Xu / 2010 / An image sharpening algorithm for high magnification image zooming / Consumer Electronics(ICCE) (2010 Digest of Technical Papers International Conference on. IEEE) :27~28
A. J. Tabatabai / 1984 / Edge location to subpixel values in digital imagery / IEEE Trans. Pattern Anal. Mach. Intell. 2:188~201
Q. Sun / 2014 / A robust edge detection method with sub-pixel accuracy / Optik - International Journal for Light and Electron Optics 125(14):3449~3453
Nam-Thai Doan / 2012 / A Fast Image Enhancement Technique Using a New Scanning Path for Critical Dimension Measurement of Glass Panels / International Journal of Precision Engineering and Manufacturing 13(12):2109~2114
N. Xu / 2010 / An image sharpening algorithm for high magnification image zooming / Consumer Electronics(ICCE) (2010 Digest of Technical Papers International Conference on. IEEE) :27~28
A. J. Tabatabai / 1984 / Edge location to subpixel values in digital imagery / IEEE Trans. Pattern Anal. Mach. Intell. 2:188~201
Q. Sun / 2014 / A robust edge detection method with sub-pixel accuracy / Optik - International Journal for Light and Electron Optics 125(14):3449~3453
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