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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2016.4
- 수록면
- 291 - 299 (9page)
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초록· 키워드
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We have investigated the ultimate limits of nonuniform grating couplers (NGCs) for optimized fibercoupling to silicon waveguides, compared to uniform grating couplers (UGCs). Simple grating couplerschemes, which can be fabricated in etching steps of the conventional complementary metal-oxidesemiconductor (CMOS) process on silicon-on-insulator (SOI) wafers without forming any additional overlaystructure, have been simulated numerically and demonstrated experimentally. Optimum values of the gratingperiod, fill factor, and groove number for ultimate coupling efficiency of the NGCs are determined fromfinite-difference time-domain (FDTD) simulation, and confirmed with experimentally demonstrated devicesby comparison to those for the UGCs. Our simulated results indicate that maximum coupling efficiencyof NGCs is possible when the minimum pattern size is below 50 nm, but the experimental value for themaximum coupling efficiency is limited by the attainable fabrication tolerance in a practical device process.
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참고문헌 (14)
참고문헌 신청
A. Mekis / 2011 / A grating-coupler-enabled CMOS photonics platform / IEEE J. Select. Topics Quantum Electron 7:597~608
J. S. Orcutt / 2011 / Nanophotonic integration in state-of-the-art CMOS foundries / Opt. Express 19:2335~2346
D. Taillaert / 2006 / Grating couplers for coupling between optical fibers and nanophotonic waveguides / Jpn. J. Appl. Phys 45:6071~6077
D. Taillaert / 2004 / Compact efficient broad band grating coupler for silicon-on-insulator waveguides / Opt. Lett 29:2749~2751
C. Li / 2013 / CMOS-compatible high efficiency double-etched apodized waveguide grating coupler / Opt. Express 21:7868~7874
J. S. Orcutt / 2011 / Nanophotonic integration in state-of-the-art CMOS foundries / Opt. Express 19:2335~2346
D. Taillaert / 2006 / Grating couplers for coupling between optical fibers and nanophotonic waveguides / Jpn. J. Appl. Phys 45:6071~6077
D. Taillaert / 2004 / Compact efficient broad band grating coupler for silicon-on-insulator waveguides / Opt. Lett 29:2749~2751
C. Li / 2013 / CMOS-compatible high efficiency double-etched apodized waveguide grating coupler / Opt. Express 21:7868~7874
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