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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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초록· 키워드
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Herein, the plasma optical emission spectra of reactive direct-current magnetron sputtering were studied and the mode change of the metallic target condition as well as the plasma energetics were investigated. Specifically, the Boltzmann plot method was used to identify the electron excitation temperature of the plasma species under the local equilibrium condition. From the comparative analysis, we found that the excitation temperature in the poisoned target mode was higher than that in the metallic mode, which correlates with the reactive gas content of the films prepared in a previous work.
목차
I. Introduction
II. Experimental Methods
III. Results
IV. Conclusion
REFERENCES
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