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논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2021.11
- 수록면
- 83 - 83 (1page)
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Direct transfer of pre-patterned device-grade nano-to-microscale materials highly benefits many existing and potential, high performance, heterogeneously integrated functional systems over conventional lithography-based microfabrication. In this work, we report a pattern transfer method that is enabled by self-delamination of a thin membrane from a substrate via controlled interfacial force in liquid environments particularly to directly transfer a thin and large area patterned single crystalline silicon (Si) membrane onto nearly any type of target substrate. Remarkably, the Si membrane can be lithographically proc ... 전체 초록 보기
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