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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.31 No.1
- 발행연도
- 2022.1
- 수록면
- 23 - 27 (5page)
이용수
초록· 키워드
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We patterned a perovskite film to fabricate thin-film transistors (TFTs) and investigated the effect of patterning on the electrical performance of the TFTs. We used a simple and effective patterning method, i.e., wet-assisted mechanical exfoliation. The perovskite films with 3 different thicknesses were fabricated using spin coating at 1,000, 2,000, and 4,000 rpm. Finally, we evaluated the performance of these TFTs. It was estimated that the film fabricated at 1,000 rpm spinning speed had the highest performance. In the best case the mobility of the TFTs reached up to 2.11 cm²/V⋅s, and very much depends on the active channel size. The proposed patterning technique enables perovskite semiconductor materials to be used in high-density arrays. In addition, it can be used for the production of electronic devices in various fields.
목차
ABSTRACT
1. Introduction
2. Experiments
3. Results and discussion
4. Conclusion
References
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