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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2007.1
- 수록면
- 18 - 21 (4page)
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Highly textured MgO template by ion-beam-assisted deposition(IBAD) was successfully fabricated using a continuous reel-to-reel(R2R) mode. To enlarge the deposition area, the previous IBAD system was modified into the system with 14-pass and five heating zone. Every processing step was carried out using this multi-turn IBAD system. The overall process consists of R2R electropolishing of a hastelloy C276 tape, deposition of $Al_2O_3$ diffusion barrier, $Y_2O_3$ seed layer, IBAD-MgO and homoepi-MgO layer. The IBAD-MgO templates were fabricated using the IBAD system with 216 cm-length deposition zone and 32 cm diameter ion source. The texture of MgO films developed during the IBAD process was monitored by in-situ reflection high energy electron diffraction(RHEED) to optimize the IBAD process. Recently, 100 m long IBAD-MgO tape with in-plane texture of $\Delta{\phi}<10^{\circ}$ was successfully fabricated using the modified IBAD system. In this report, the detailed deposition condition of getting a long length IBAD-MgO template with a good epitaxy is described.
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Fabrication of Highly Textured IBAD-MgO Template by Continuous Reel-to-reel Process
한국초전도학회 High Temperature Superconductivity
2006 .01
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A Comparative Study on Epitaxial Properties of Various Buffer Layers on IBAD-MgO Template
한국초전도학회 학술대회
2009 .01
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IBAD-MgO technology for coated conductors
한국초전도·저온공학회논문지
2016 .01
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Reel-to-reel Electropolishing of Ni Alloy Tapes for IBAD Template
한국초전도학회 High Temperature Superconductivity
2004 .01
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Fabrication of Biaxially Textured IBAD-MgO Film for Superconducting Wire
한국초전도학회 High Temperature Superconductivity
2005 .01
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IBAD 법에 의한 Template 기술 개발 현황 및 전망
초전도와 저온공학
2003 .01
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펄스레이저법으로 MgO 단결정 기판위에 YBCO/BaZrO$_3$ 박막의 증착
한국초전도·저온공학회논문지
2004 .01
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IBAD template용 니켈 합금의 연속 전해연마
Progress in superconductivity
2004 .01
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New MOD Approach for YBCO Coated Conductor on the IBAD-MgO Template
한국초전도학회 High Temperature Superconductivity
2008 .01
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연속 공정 PVD 방법에 의한 Coated Conductor 제조
전기전자재료학회논문지
2004 .01
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High Temperature Superconductor $2^{nd}$ Generation Wire Fabricated by IBAD and Reactive Co-evaporation Method
한국초전도학회 High Temperature Superconductivity
2007 .01
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Ex-Situ Conversion of SmBCO Films on the IBAD-MgO Substrate
한국초전도학회 학술대회
2009 .01
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MOD-processed YBCO coated conductors on the $CeO_2$-buffered IBAD-MgO template
한국초전도·저온공학회논문지
2009 .01
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IBAD로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성 ( Nanotribological Characteristics of Silicon Surfaces Modified by IBAD )
Tribology and Lubricants
2002 .02
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IBAD로 표면개질된 실리콘표면의 나노 트라이볼로지적 특성 ( Nanotribological characteristics of silicon surfaces modified by IBAD )
한국트라이볼로지학회 학술대회
2001 .06
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MOCVD 공정으로 IBAD 템플릿 위에 제조된 YBa$_2$Cu$_3$O$_{7-x}$ 박막
한국초전도·저온공학회논문지
2004 .01
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High-$J_c$ $GdBa_2Cu_3O_y$ films on $BaHfO_3$ buffered IBAD MgO template
한국초전도·저온공학회논문지
2011 .01
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SmBCO/IBAD-MgO Coated Conductors Fabricated by Reactive Co-evaporation
한국초전도학회 High Temperature Superconductivity
2008 .01
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IBAD-MgO 기판 위 다양한 완충층들의 비교 연구
한국초전도·저온공학회논문지
2008 .01
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Fabrication of Thick SmBCO/IBAD-MgO Coated Conductor
한국초전도학회 학술대회
2009 .01
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