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논문 기본 정보

자료유형
학술저널
저자정보
Kim, Hyung-Taek (Department of Advanced Materials Engineering, Incheon National University) Kim, Kang-Won (Department of Advanced Materials Engineering, Incheon National University)
저널정보
한국인터넷방송통신학회 International journal of advanced smart convergence International journal of advanced smart convergence 제8권 제4호
발행연도
2019.1
수록면
200 - 206 (7page)

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In this study, we compared the VacCAD and VacSim(Multi), commercial vacuum simulators, to verify the advantages of VacCAD's efficiency. It was emphasized on immediacy and simplicity of simulation modelling, and characteristics of the pump combinations, pumping down curves, and vacuum materials. First, usability of simulation mechanism was estimated through the modeling schematics and obtained simulation results of each employed simulator were compared to evaluate the applicability in practice. Simulation reliability of each simulator was also probed by comparing the pumping characteristics of commercially available high vacuum systems. In addition, the degree of tolerances on VacCAD was also investigated through pumping down analysis considering outgassing effect due to chamber material variations. The higher effectiveness and expediency of VacCAD than VacSim(Multi) has been presented, and it was expected that the utilization of VacCAD in vacuum applications to be increased.

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