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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2012.1
- 수록면
- 99 - 101 (3page)
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초록· 키워드
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Fluorescent yield X-ray absorption fine structure (XAFS) spectroscopy is useful for analyzing local structure of specific elements in matrices. We developed an XAFS apparatus with a 100-pixel superconducting tunnel junction (STJ) detector array with a high sensitivity and a high resolution for light-element dopants in wide-gap semiconductors. An STJ detector has a pixel size of $100{\mu}m$ square, and an asymmetric layer structure of Nb(300 nm)-Al(70 nm)/AlOx/Al(70 nm)-Nb(50 nm). The 100-pixel STJ array has an effective area of $1mm^2$. The XAFS apparatus with the STJ array detector was installed in BL-11A of High Energy Accelerator Research Organization, Photon Factory (KEK PF). Fluorescent X-ray spectrum for boron nitride showed that the average energy resolution of the 100-pixels is 12 eV in full width half maximum for the N-K line, and The C-K and N-K lines are separated without peak tail overlap. We analyzed the N dopant atoms implanted into 4H-SiC substrates at a dose of 300 ppm in a 200 nm-thick surface layer. From a comparison between measured X-ray Absorption Near Edge Structure (XANES) spectra and ab initio FEFF calculations, it has been revealed that the N atoms substitute for the C site of the SiC lattice.
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참고문헌 (7)
참고문헌 신청
T. Kimoto / 1997 / Nitrogen ion implantation into α-SiC epitaxial layers / Phys. Stat. Sol. A 162:263~276
S. Friedrich / 2001 / A multichannel superconducting soft x-ray spectrometer for high-resolution spectroscopy of dilute samples / Rev. Sci. Instrum 73:1629~1631
P. Fons / 2006 / Direct observation of nitrogen location in molecular beam epitaxy grown nitrogen-doped ZnO / Phys. Rev. Lett 96:045504
S. Shiki / 2009 / Soft X-ray spectrometer using 100-pixel STJ detectors for synchrotron radiation / AIP Conf. Ser 1185:409~412
M. Ukibe / 2012 / Soft X-ray detection performance of superconducting tunnel junction arrays with asymmetric tunnel junction layer structure / Jpn. J. Appl. Phys 51:010115
S. Friedrich / 2001 / A multichannel superconducting soft x-ray spectrometer for high-resolution spectroscopy of dilute samples / Rev. Sci. Instrum 73:1629~1631
P. Fons / 2006 / Direct observation of nitrogen location in molecular beam epitaxy grown nitrogen-doped ZnO / Phys. Rev. Lett 96:045504
S. Shiki / 2009 / Soft X-ray spectrometer using 100-pixel STJ detectors for synchrotron radiation / AIP Conf. Ser 1185:409~412
M. Ukibe / 2012 / Soft X-ray detection performance of superconducting tunnel junction arrays with asymmetric tunnel junction layer structure / Jpn. J. Appl. Phys 51:010115
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