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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2014.1
- 수록면
- 15 - 20 (6page)
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The fracture analysis of $SiN_x$ layers, which were deposited by low-temperature plasma enhanced chemical vapor deposition (LT-PECVD) and could be used for an encapsulation layer of a flexible organic light emitting display (OLED), was performed by an electrical method. The specimens of metal-insulator-metal (MIM) structure were prepared using Pt and ITO electrodes. We stressed MIM specimen mechanically by bending outward with a bending radius of 15mm repeatedly and measured leakage current through the top and bottom electrodes. We also observed the cracks, were generated on surface, by using optical microscope. Once the cracks were initiated, the leakage current started to flow. As the amount of cracks increased, the leakage current was also increased. By correlating the electrical leakage current in the MIM specimen with the bending times, the amount of cracks in the encapsulation layer, generated during the bending process, was quantitatively estimated and fracture behavior of the encapsulation layer was also closely investigated.
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참고문헌 (10)
참고문헌 신청
P. Burrows / 1994 / Reliability and degradation of organic light emitting devices / Applied Physics Letters 65:2922~2924
Y. Sato / 1994 / Stability of organic electroluminescent diodes / Molecular Crystals and Liquid Crystals 252:435~442
L. Do / 1994 / Observation of degradation processes of Al electrodes in organic electroluminescence devices by electroluminescence microscopy, atomic force microscopy, scanning electron microscopy, Auger electron spectroscopy / Journal of applied physics 76:5118~5121
J. S. Lewis / 2004 / Thin-film permeation-barrier technology for flexible organic light-emitting devices / Selected Topics in Quantum Electronics, IEEE Journal of 10:45~57
N. Kim / 2009 / Fabrication and characterization of thin-film encapsulation for organic electronics
Y. Sato / 1994 / Stability of organic electroluminescent diodes / Molecular Crystals and Liquid Crystals 252:435~442
L. Do / 1994 / Observation of degradation processes of Al electrodes in organic electroluminescence devices by electroluminescence microscopy, atomic force microscopy, scanning electron microscopy, Auger electron spectroscopy / Journal of applied physics 76:5118~5121
J. S. Lewis / 2004 / Thin-film permeation-barrier technology for flexible organic light-emitting devices / Selected Topics in Quantum Electronics, IEEE Journal of 10:45~57
N. Kim / 2009 / Fabrication and characterization of thin-film encapsulation for organic electronics
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