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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2012.1
- 수록면
- 63 - 69 (7page)
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초록· 키워드
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As decreasing size of chips, the need of wafer level packaging is increased in semi-conductor and display industries. Temperature uniformity is a crucial factor in vacuum soldering process to guarantee quality of bonding between chips and wafer. In this paper, a stepwise iterative algorithm has been suggested to obtain output profile of each heat source. Since this algorithm is based on open-loop stepwise iterative experimental technique, it is easier to implement and cost effective than real time feedback controls. Along with some experiments, it was shown that the suggested algorithm can remarkably improve temperature uniformity of wafer during whole heating process compared with the ordinary manual trial-and error method.
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등록된 정보가 없습니다.
참고문헌 (10)
참고문헌 신청
Lee, E. S. / 2004 / A Novel Wafer-Level-packing Scheme Using Solder / J. of The Korean Society of Semiconductor & Display Technology 3:5~9
Cho, M. / 2005 / Semi-Empirical Model Based Multivariable Iterative Learning Control of an RTP System / IEEE Trans. On Semiconductor Manufacturing 18(3):430~439
Won, W. / 2010 / Combained Run-to-Run and Delta LQG Control: Controller Design and Application to 12-inch RTP Equipment / Int. Conference on Control, Automation and Systems 2010 :469~474
Ebert, J. L. / 2010 / Model based Temperature Control of Heaated Plates / 18th IEEE Conference on Advanced Thermal Processing of Semiconductors-RTP 2010
Albertos, P. / 2000 / Model-based Iterative Control Design / Proc. of theAmerican Control Conference :2578~2582
Cho, M. / 2005 / Semi-Empirical Model Based Multivariable Iterative Learning Control of an RTP System / IEEE Trans. On Semiconductor Manufacturing 18(3):430~439
Won, W. / 2010 / Combained Run-to-Run and Delta LQG Control: Controller Design and Application to 12-inch RTP Equipment / Int. Conference on Control, Automation and Systems 2010 :469~474
Ebert, J. L. / 2010 / Model based Temperature Control of Heaated Plates / 18th IEEE Conference on Advanced Thermal Processing of Semiconductors-RTP 2010
Albertos, P. / 2000 / Model-based Iterative Control Design / Proc. of theAmerican Control Conference :2578~2582
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