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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2013.1
- 수록면
- 67 - 72 (6page)
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Temperature is a critical parameter in yield improvement for wafer manufacturing. In chemical vapor deposition (CVD) equipment, crack defect in ceramic heater leads to yield reduction, however, there is no suitable ceramic heater fault detection system for conventional CVD equipment. This paper proposes a short-time zero-crossing rate based fault detection method for the ceramic heater in CVD equipment. The proposed method measures the output signal ($V_{pp}$) of RF filter and extracts the zero-crossing rate (ZCR) as feature vector. The extracted feature vectors have a discriminant power and Gaussian mixture model (GMM) based fault detection method can detect fault in ceramic heater. Experimental results, carried out by measured signals provided by a CVD equipment manufacturer, indicate that the proposed method detects effectively faults in various process conditions.
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참고문헌 (7)
참고문헌 신청
J.-H. Pak / 2001 / Chemical Vapor Deposition / ASM International
J. R. Deller / 1993 / Discrete-time processing of speech signals / Macmillan publishing company
C. E. Rasmussen / 2000 / The infinite Gaussian mixture model / Advances in neural information processing systems 12(5.2):2
J. Ko / 2013 / Fault diagnosis for ceramic heater in CVD equipment / International Technical Conference on Circuits/Systems, Computers and Communications
J. Ko / 2013 / Multiple Gaussian mixture model based fault diagnosis for ceramic heater in CVD equipment / IEEK summer conference 2013
J. R. Deller / 1993 / Discrete-time processing of speech signals / Macmillan publishing company
C. E. Rasmussen / 2000 / The infinite Gaussian mixture model / Advances in neural information processing systems 12(5.2):2
J. Ko / 2013 / Fault diagnosis for ceramic heater in CVD equipment / International Technical Conference on Circuits/Systems, Computers and Communications
J. Ko / 2013 / Multiple Gaussian mixture model based fault diagnosis for ceramic heater in CVD equipment / IEEK summer conference 2013
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