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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2014.1
- 수록면
- 35 - 38 (4page)
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초록· 키워드
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Flat panel displays fabricated on glass substrate use amorphous Si for data processing circuit. Recent progress in display technology requires a new material to replace the amorphous Si, and ZnO is a good candidate. ZnO is a wide bandgap (3.3 eV) semiconductor with high mobility and good optical transparency. ZnO is usually grown by sputtering using ZnO ceramic target. However, ceramic target is more expensive than metal target, and making large area target is very difficult. In this work we studied characteristics of ZnO thin-film transistor grown by rf sputtering using Zn metal target and $CO_2$. ZnO film was grown at $450^{\circ}C$ substrate temperature, with -70 V substrate bias voltage applied. By using these methods, our ZnO TFT showed $5.2cm^2/Vsec$ mobility, $3{\times}10^6$ on-off ratio, and -7 V threshold voltage.
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참고문헌 (7)
참고문헌 신청
Nomura, K. / 2004 / Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors / Nature 432:488
Jo, J. / 2008 / Enhancement-mode ZnO thin-film transistor grown by metalorganic chemical vapor deposition / Applied Physics Express 1
Abe Y. / 1365 / Time-dependent variation of the target mode in reactive sputtering of Al–O2 system / Vacuum 84:2010
Li, S. / 2012 / Low-Temperature ZnO TFTs Fabricated by Reactive Sputtering of Metallic Zinc Target / IEEE Transactions on Electron Devices 59:2555
Takayanagi, S. / 2013 / Effect of metal mode and oxide mode on unusual c-axis parallel oriented ZnO film growth on Al/glass substrate in a reactive magnetron sputtering of Zn target / Journal of Crystal Growth 363:22
Jo, J. / 2008 / Enhancement-mode ZnO thin-film transistor grown by metalorganic chemical vapor deposition / Applied Physics Express 1
Abe Y. / 1365 / Time-dependent variation of the target mode in reactive sputtering of Al–O2 system / Vacuum 84:2010
Li, S. / 2012 / Low-Temperature ZnO TFTs Fabricated by Reactive Sputtering of Metallic Zinc Target / IEEE Transactions on Electron Devices 59:2555
Takayanagi, S. / 2013 / Effect of metal mode and oxide mode on unusual c-axis parallel oriented ZnO film growth on Al/glass substrate in a reactive magnetron sputtering of Zn target / Journal of Crystal Growth 363:22
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