지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
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In this work, Ga doped ZnO (GZO) films were prepared by radio frequency (RF) magnetron sputtering without intentional substrate heating on glass substrate and then the effect of the intense electron irradiation on structural and electrical properties and the NOx gas sensitivity were investigated. Although as deposited GZO films showed a diffraction peak for ZnO (002) in the XRD pattern, GZO films that electron irradiated at electron energy of 900 eV showed the higher intense diffraction peaks than that of the as deposited GZO films. The electrical property of the films are also influenced with electron's energy. As deposited GZO films showed the three times higher resistivity than that of the films irradiated at 900 eV In addition, the sensitivity for NOx gas is also increased with electron irradiation energy and the film sensor showed the proportionally increased gas sensitivity with NOx concentration. This approach is promising in gaining improvement in the performance of thin film gas sensors used for the detection of hazard gas phase.
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참고문헌 (11)
참고문헌 신청
신창호 / 2010 / Enhancement of Methanol Gas Sensitivity of Cu Intermediate ITO Film Gas Sensors / 한국재료학회지 20(5):267~270
T. Pisarkiewicz / 2003 / Thin Solid Films 436:84
F. Chaabouni / 2004 / Sens.Actuators B 100:200
장간 / 2010 / Photocatalytic Degradation of Methylene Blue by ACF/TiO2 and ACF/ZnO Composites under UV Light / 한국재료학회지 20(1):31~36
선정호 / 2009 / ZnO 분말 타겟을 스퍼터링하여 Glass 기판위에 증착한 ZnO 박막의 구조적, 광학적 특성 / 한국진공학회지 18(5):394~401
T. Pisarkiewicz / 2003 / Thin Solid Films 436:84
F. Chaabouni / 2004 / Sens.Actuators B 100:200
장간 / 2010 / Photocatalytic Degradation of Methylene Blue by ACF/TiO2 and ACF/ZnO Composites under UV Light / 한국재료학회지 20(1):31~36
선정호 / 2009 / ZnO 분말 타겟을 스퍼터링하여 Glass 기판위에 증착한 ZnO 박막의 구조적, 광학적 특성 / 한국진공학회지 18(5):394~401
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