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To reduce manufacturing costs of crystalline silicon solar cells, silicon wafers have become thinner. In relation to this, the properties of the aluminium-back surface field (Al-BSF) are considered an important factor in solar cell performance. Generally, screen-printing and a rapid thermal process (RTP) are utilized together to form the Al-BSF. This study evaluates Al-BSF formation on a (111) textured back surface compared with a (100) flat back surface with variation of ramp up rates from 18 to $89^{\circ}C$/s for the RTP annealing conditions. To make different back surface morphologies, one side texturing using a silicon nitride film and double side texturing were carried out. After aluminium screen-printing, Al-BSF formed according to the RTP annealing conditions. A metal etching process in hydrochloric acid solution was carried out to assess the quality of Al-BSF. Saturation currents were calculated by using quasi-steady-state photoconductance. The surface morphologies observed by scanning electron microscopy and a non-contacting optical profiler. Also, sheet resistances and bulk carrier concentration were measured by a 4-point probe and hall measurement system. From the results, a faster ramp up during Al-BSF formation yielded better quality than a slower ramp up process due to temperature uniformity of silicon and the aluminium surface. Also, in the Al-BSF formation process, the (111) textured back surface is significantly affected by the ramp up rates compared with the (100) flat back surface.
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참고문헌 (15)
참고문헌 신청
A. Wang / 1996 / Progress in Photovoltaics: Research and Applications 4(1):55
G. P. Willeke / 2002 / Sol. Energ. Mater. Sol. Cell 72(1):191
강병준 / 2010 / 태양전지용 실리콘 기판의 절삭손상 식각 조건에 의한 곡강도 변화 / 한국재료학회지 20(11):617~622
O. N. Hartley / 2002 / in Proceedings of 29th IEEE Photovoltaic Specialists Conference :118
Zs. Makaro / 1998 / Vacuum 50(3):481
G. P. Willeke / 2002 / Sol. Energ. Mater. Sol. Cell 72(1):191
강병준 / 2010 / 태양전지용 실리콘 기판의 절삭손상 식각 조건에 의한 곡강도 변화 / 한국재료학회지 20(11):617~622
O. N. Hartley / 2002 / in Proceedings of 29th IEEE Photovoltaic Specialists Conference :118
Zs. Makaro / 1998 / Vacuum 50(3):481
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