지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국전기전자재료학회 Transactions on Electrical and Electronic Materials Transactions on Electrical and Electronic Materials 제20권 제5호
- 발행연도
- 2019.1
- 수록면
- 473 - 480 (8page)
이용수
초록· 키워드
오류제보하기
This paper models the fringing fi eld eff ects in a capacitive micromachined ultrasonic transducer (CMUT) structure for determining the sensitivity of the device. CMUT is used as a medical imaging component which can be an important module for sustainable healthcare system. The capacitance value of the device is evaluated based on Younes Ataiiyan’s method. To determine the equivalent capacitance of the device, the capacitances of the membrane, gap and silicon nitride insulating layer are associated in series. Mason’s modeling techniques are used to evaluate the membrane displacement. Circular membrane approximation model has been considered. Eff ects of the variation in membrane thickness, gap separation, and membrane radius on membrane displacement are investigated. The analytical prediction has been validated with the finite element method simulation results through PZFlex. Three dimensional modeling is carried out to accurately capture the characteristic behavior of the device. The agreements of both results are excellent which verifi es that fringing field effects exist in the device operation.
목차
등록된 정보가 없습니다.
참고문헌 (27)
참고문헌 신청
F. L. Degertakin / 2006 / Annular ring CMUT arrays for forward-looking IVUS : transducer characterization and imaging / IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53(2):474~482
G. Gurun / 2011 / Front-end receiver electronics for high-frequency monolithic CMUT-on-CMOS imaging arrays / IEEE Trans. Ultrason. Ferroelectr. Freq. Control 58(8):1658~1668
A. Ramanaviciene / 2010 / Capacitive micromachined ultrasound transducer(cMUT)for immunosensor design / Analyst 135(7):1531~1534
O. Naor / 2012 / Towards multifocal ultrasonic neural stimulation II : design considerations for an acoustic retinal prosthesis / J. Neural Eng 9(2):026006
M. D. Menz / 2013 / Precise neural stimulation in the retina using focused ultrasound / J. Neurosc 33(10):4550~4560
G. Gurun / 2011 / Front-end receiver electronics for high-frequency monolithic CMUT-on-CMOS imaging arrays / IEEE Trans. Ultrason. Ferroelectr. Freq. Control 58(8):1658~1668
A. Ramanaviciene / 2010 / Capacitive micromachined ultrasound transducer(cMUT)for immunosensor design / Analyst 135(7):1531~1534
O. Naor / 2012 / Towards multifocal ultrasonic neural stimulation II : design considerations for an acoustic retinal prosthesis / J. Neural Eng 9(2):026006
M. D. Menz / 2013 / Precise neural stimulation in the retina using focused ultrasound / J. Neurosc 33(10):4550~4560
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
Design of Single Cell Membrane Shape and Array Configuration for MEMS Based Micromachined Ultrasonic Sensor to Improve the Performance: A Three Dimensional Model Characterization
Transactions on Electrical and Electronic Materials
2021 .12
-
Performance Analysis of Nano-Electro-Mechanical-System Ultrasonic Sensor with Fringing Field Effects
Transactions on Electrical and Electronic Materials
2021 .12
-
Nafion®117 전해막의 가습에 다른 팽창 특성
대한기계학회 춘추학술대회
2019 .05
-
나피온 117 전해질 막의 수분 투과 특성
대한기계학회 춘추학술대회
2018 .04
-
The Fabrication of Floating Gate CMUT with Multi Cantilevers and Its Failure Analysis
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
2021 .02
-
정전용량형 미세가공 초음파 트랜스듀서 2-D 원형 어레이를 이용한 3-D 광음향 이미지 시스템
대한기계학회 춘추학술대회
2019 .05
-
The study for increase the performance of Polymer based piezoelectric membrane device
대한기계학회 춘추학술대회
2022 .05
-
Preparation of pore-filled polyethylene membrane for membrane capacitive deionization
한국고분자학회 학술대회 연구논문 초록집
2016 .10
-
이산화탄소 검출을 위한 2채널 CMUT 화학센서
비파괴검사학회지
2019 .04
-
Preparation of pore-filled cation exchange membranes for membrane capacitive deionization
한국고분자학회 학술대회 연구논문 초록집
2016 .04
-
An application of self-made ceramic membrane on transport membrane condenser for waste gas heat and wastewater recovery
대한설비공학회 학술발표대회논문집
2021 .11
-
Implementation of simultaneous measurement of ultrasound and photoacoustic image based on capacitive micromachined ultrasonic taransducer (CMUT) using pulsed laser
대한기계학회 춘추학술대회
2019 .05
-
용량형 압력 센서의 설계 및 특성해석에 대한 기초적 연구
반도체디스플레이기술학회지
2015 .01
-
Innovative membrane technology for water treatment solutions: Current status and future prospects of carbon nanotube membranes
Environmental Engineering Research
2024 .12
-
막장력 측정을 통한 막구조물의 장력 유지관리 시스템 검토
한국공간구조학회지
2016 .01
-
Characterization of Polymer Electrolyte Membranes for Application in Glucose Fuel Cells
BioChip Journal
2016 .01
-
전기응집 분리 막 생물반응기의 막 오염 저감
한국산학기술학회 논문지
2018 .08
-
Membrane Fouling and Rejection of Microplastics in Membrane Separation Process
한국고분자학회 학술대회 연구논문 초록집
2022 .04
-
Preparation and application of superhydrophobic membranes in membrane distillation for treating saline dental wastewater
Environmental Engineering Research
2025 .08
-
막여과 정수처리 공정에서 화학세척을 위한 막세척 지수 평가
한국수처리학회지
2015 .01
이 논문의 저자 정보
최근 본 자료
댓글(0)
0