Effects of Chamber Wall Contamination Levels on Plasma Properties in Long-Term C₄F₈/Ar Plasma Deposition Processes

Woojin Pa ,  k ,  Sangjun Pa 외 2명

Applied Science and Convergence Technology

2024 .11

Control of magnetization compensation temperature in ferrimagnetic GdCo thin films by He⁺ irradiation

Jisu Kim ,  Seyeop Jeong ,  Donghyeon Lee 외 6명

한국자기학회 학술연구발표회 논문개요집

2021 .07

Comparison of Ar and He atmospheric pressure plasma jets to enhance cutaneous delivery of epidermal growth factor by regulating cell junctions

이현영 ,  당천우 ,  최정해 외 3명

한국진공학회 학술발표회초록집

2018 .02

A study on ICP-RIE glass texturing by SF₆/Ar plasma for high haze ratio

Junyoung KANG ,  Shahzada Qama ,  HUSSAIN 외 2명

한국진공학회 학술발표회초록집

2016 .08

Effects of atmospheric pressure plasma irradiation to plant seeds put in magnetic field on the plant growth

Thapanut SARINONT ,  Pankaj ATTRI ,  Kazuno 외 3명

한국진공학회 학술발표회초록집

2016 .08

Development of methodology for Individual control of ion and radical in dual freqeuncy(13.56 ㎒ + 400 ㎑) pulsed Ar/CF₄/O₂ plasma

정원녕 ,  이장재 ,  이영석 외 4명

한국진공학회 학술발표회초록집

2021 .02

Effect of plasma jet irradiation distance on the formation of reactive oxygen and nitrogen species in atmospheric pressure plasma jet exposed to liquid surface

Bhagi ,  ath Ghimi ,  e 외 6명

한국진공학회 학술발표회초록집

2017 .02

Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure

So ,  a Lee ,  Yejin Shon 외 3명

Applied Science and Convergence Technology

2020 .11

Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma

김태환 ,  이승환

한국진공학회 학술발표회초록집

2019 .08

Flexible Plasma Sheets

Guangsup Cho ,  Yunjung Kim

Applied Science and Convergence Technology

2018 .03

낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구

탁현우 ,  문룡 ,  성다인 외 3명

한국진공학회 학술발표회초록집

2020 .02

Characterization of inductively coupled Ar/CH4 plasma using tuned single langmuir probe and fluid simulation

차주홍 ,  한문기 ,  김동현 외 2명

한국진공학회 학술발표회초록집

2015 .08

Microtrenching of SiO₂ contact hole etching in C₄F₈/Ar capacitively coupled plasma

S. J. Kim ,  J. J. Lee ,  H. J. Yeom 외 2명

한국진공학회 학술발표회초록집

2017 .08

Effect of hybrid plasma source on O radical generation in oxygen plasma

Kwan-Yong Kim ,  Kyung-Hyun Kim ,  Young-Hun Hong 외 2명

한국진공학회 학술발표회초록집

2018 .08

Challenges and Solution on Large Scale of Atmospheric Pressure Plasma for Environmental Plasma Applications

Due Ba Nguyen ,  Nosi ,  Matyakubov 외 3명

한국진공학회 학술발표회초록집

2020 .08

Oxide 및 Nitride 고선택비 식각 공정에서의 CF4(CHF3)/O2/Ar inductively coupled pulsed plasmas

김희주 ,  신예지 ,  김교운 외 4명

한국진공학회 학술발표회초록집

2020 .02

Spectroscopic Analysis of Effects of Additive Nitrogen on Atmospheric Pressure Ar/HMDS Plasma

Jonggu Han ,  Rodolphe Mauchauffé ,  Se Youn Moon

Applied Science and Convergence Technology

2023 .09

Improved Spin-Orbit Torque Switching Efficiency by He⁺ Ion Irradiation

Suhyeok An ,  Eunchong Baek ,  Jin-A Kim 외 2명

한국자기학회 학술연구발표회 논문개요집

2021 .07

50 mm-wide atmospheric pressure plasma generated by two plasma jets

Jun-Goo SHIN ,  Hyun-Jin KIM ,  Heung-Sik TAE

한국진공학회 학술발표회초록집

2016 .08

마이크로스트립 라인을 이용한 마이크로웨이브 플라즈마 기술 및 응용

김재호

진공이야기

2020 .09