지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- Korean Society for Precision Engineering Journal of the Korean Society for Precision Engineering Journal of the Korean Society for Precision Engineering Vol.37 No.3
- 발행연도
- 2020.3
- 수록면
- 181 - 186 (6page)
- DOI
- 10.7736/JKSPE.019.130
이용수
초록· 키워드
오류제보하기
A spectral-domain interferometer with dual reference paths and orthogonal polarization states to avoid measurement errors when interference signals overlap is proposed and realized. In our previous study, by using dual reference mirrors, two inherent problems of the spectral-domain interferometer, the non-measurable range and the directional ambiguity problem, were successfully solved. However, because of the overlap of interference signals, the absolute distance values were distorted. In this study, the polarization states of beams from two reference paths were made orthogonal to eliminate the interference signal between them, so that the overlap can be essentially avoided. First, we performed a numerical simulation on the measurement error with respect to the degree of superposition of the interference signals. Simulation results show that with the previous method the measurement error can be up to approximately 1 μm within the overlap region, but the proposed method drastically reduced this error to below 100 nm. Then, the proposed method was experimentally realized and verified. In conclusion, the proposed method can measure the absolute distances without the inherent problems as well as the measure errors caused by the overlap of the interference signals.
목차
1. 서론
2. 기본 이론
3. 수치 시뮬레이션 및 절대 거리 측정 실험
4. 결론
REFERENCES
참고문헌 (22)
참고문헌 신청
Bourdet, G. and Orszag, A., “Absolute Distance Measurements by CO2 Laser Multiwavelength Interferometry,” Applied Optics, Vol. 18, No. 2, pp. 225-227, 1979.
Jin, J., Kim, Y. J., Kim, Y., Kim, S. W., and Kang, C. S., “Absolute Length Calibration of Gauge Blocks Using Optical Comb of a Femtosecond Pulse Laser,” Optics Express, Vol. 14, No. 13, pp. 5968-5974, 2006.
Jang, Y. S., Wang, G., Hyun, S., Kang, H. J., Chun, B. J., et al., “Comb-Referenced Laser Distance Interferometer for Industrial Nanotechnology,” Scientific Reports, Vol. 6, No. 1, pp. 1-10, 2016.
Coe, P. A., “An Investigation of Frequency Scanning Interferometery for the Alignment of the ATLAS Semiconductor Tracker,” Ph.D. Thesis, Oxford University, 2011.
Dale, J., Hughes, B., Lancaster, A. J., Lewis, A. J., Reichold, A. J., et al., “Multi-Channel Absolute Distance Measurement System with Sub Ppm-Accuracy and 20 m Range Using Frequency Scanning Interferometry and Gas Absorption Cells,” Optics Express, Vol. 22, No. 20, pp. 24869-24893, 2014.
Jin, J., Kim, Y. J., Kim, Y., Kim, S. W., and Kang, C. S., “Absolute Length Calibration of Gauge Blocks Using Optical Comb of a Femtosecond Pulse Laser,” Optics Express, Vol. 14, No. 13, pp. 5968-5974, 2006.
Jang, Y. S., Wang, G., Hyun, S., Kang, H. J., Chun, B. J., et al., “Comb-Referenced Laser Distance Interferometer for Industrial Nanotechnology,” Scientific Reports, Vol. 6, No. 1, pp. 1-10, 2016.
Coe, P. A., “An Investigation of Frequency Scanning Interferometery for the Alignment of the ATLAS Semiconductor Tracker,” Ph.D. Thesis, Oxford University, 2011.
Dale, J., Hughes, B., Lancaster, A. J., Lewis, A. J., Reichold, A. J., et al., “Multi-Channel Absolute Distance Measurement System with Sub Ppm-Accuracy and 20 m Range Using Frequency Scanning Interferometry and Gas Absorption Cells,” Optics Express, Vol. 22, No. 20, pp. 24869-24893, 2014.
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