지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.19 No.5
- 발행연도
- 2019.10
- 수록면
- 446 - 453 (8page)
- DOI
- 10.5573/JSTS.2019.19.5.446
이용수
초록· 키워드
오류제보하기
We developed an orbital driving method without time-sharing for piezoelectric gyroscopes operating at atmospheric pressure with a square wave signal having a phase difference of π / 2 by utilizing the resonance characteristics of the gyroscopes, and experimentally verified our method. The operation bandwidth of piezoelectric gyroscopes is limited by the time-sharing between the horizontal and vertical resonance modes. The Lissajous waveform changes from elliptical to circular after controlling the phase. The simulation results show that the natural frequency of the gyroscope is in the order of tens of ㎑. The angular response rate is 1 deg/s in the xand y-directions, and the measurement sensitivity is 17.2 ㎶/(deg/s). All the designed systems are verified through simulations and experiments.
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. STRUCTURE SCHEMATIC AND SIMULATION
Ⅲ. RESULTS AND DISCUSSION
Ⅳ. CONCLUSIONS
REFERENCES
참고문헌 (19)
참고문헌 신청
K. Liu et al., “The development of microgyroscope technology,” Journal of Micromechanics and Microengineering, vol. 19, no. 11, 2009.
V. M. N. Passaro, A. Cuccovillo, L. Vaiani, M. Carlo, and C. E. Campanella, “Gyroscope Technology and Applications: A Review in the Industrial Perspective,” Sensors (Basel), vol. 17, no. 10, Oct 7 2017.
D. Xia, C. Yu, and L. Kong, “The Development of Micromachined Gyroscope Structure and Circuitry Technology,” Sensors, vol. 14, no. 1, p. 1394, 2014.
M. N. Armenise, “MEMS Gyroscopes,” in Advances in Gyroscope TechnologiesBerlin, Heidelberg: Springer Berlin Heidelberg, 2011, pp. 83-102.
R. K. Curey, M. E. Ash, L. O. Thielman, and C. H. Barker, “Proposed IEEE inertial systems terminology standard and other inertial sensor standards,” in PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No.04CH37556), 2004, pp. 83-90.
V. M. N. Passaro, A. Cuccovillo, L. Vaiani, M. Carlo, and C. E. Campanella, “Gyroscope Technology and Applications: A Review in the Industrial Perspective,” Sensors (Basel), vol. 17, no. 10, Oct 7 2017.
D. Xia, C. Yu, and L. Kong, “The Development of Micromachined Gyroscope Structure and Circuitry Technology,” Sensors, vol. 14, no. 1, p. 1394, 2014.
M. N. Armenise, “MEMS Gyroscopes,” in Advances in Gyroscope TechnologiesBerlin, Heidelberg: Springer Berlin Heidelberg, 2011, pp. 83-102.
R. K. Curey, M. E. Ash, L. O. Thielman, and C. H. Barker, “Proposed IEEE inertial systems terminology standard and other inertial sensor standards,” in PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No.04CH37556), 2004, pp. 83-90.
함께 읽어보면 좋을 논문
논문 유사도에 따라 DBpia 가 추천하는 논문입니다. 함께 보면 좋을 연관 논문을 확인해보세요!
-
3D Gyroscope Wi-Fi for Robot Application with Modbus
제어로봇시스템학회 국제학술대회 논문집
2024 .10
-
Design and Vibration Analysis of Tri-axis Linear Vibratory MEMS Gyroscope
센서학회지
2017 .07
-
Design optimization of 100 ㎛ thick single structure three-axis MEMS gyroscope
항공우주시스템공학회 학술행사 논문집
2019 .05
-
자이로 센서를 이용한 가상 음원의 실시간 위치 제어
Proceedings of KIIT Conference
2019 .06
-
Electrical Modeling of Piezoelectric Elements and Efficient Driving Method
전력전자학회 학술대회 논문집
2015 .07
-
Preparation of Highly (002) Oriented Ti Films on a Floating Si (100) Substrate by RF Magnetron Sputtering
Electronic Materials Letters
2020 .01
-
Machining head with gyroscope mechanism for mobile machine tool
한국생산제조학회 학술발표대회 논문집
2020 .10
-
가속도계 및 자이로의 기구적 비정렬 보정 방법
제어로봇시스템학회 각 지부별 자료집
2018 .11
-
김발 제어용 MEMS 2축 자이로스코프 개발
한국항공우주학회 학술발표회 초록집
2021 .11
-
Line-of-Sight 안정화 시스템을 위한 저가형 광자이로스코프 구현
제어로봇시스템학회 논문지
2015 .02
-
Vibration Suppression Control for Robot Machining with Gyroscope Mechanism
한국정밀공학회 학술발표대회 논문집
2024 .11
-
A State-of-the-Art Review of Structural Monitoring Using Piezoelectric Paint Sensors
Journal of the Korean Society for Precision Engineering
2021 .12
-
Fully Automated Falling Detection Sensor and Algorithm Using Mobile Phone for Elderly Person
대한전자공학회 학술대회
2017 .01
-
Unhealthy Sitting Behavior Recognition and Notification based on Gyroscope and Accelerometer Sensor Data
한국통신학회 학술대회논문집
2019 .06
-
모바일 가공기를 위한 자이로스코프 메카니즘에 관한 연구
한국정밀공학회 학술발표대회 논문집
2017 .05
-
제어모멘트자이로 열해석을 통한 주요 구성품의 온도 분석
한국정밀공학회 학술발표대회 논문집
2024 .11
-
Fabrication of Flexible Piezoelectric Sensor using 3D Printed Mold Assembly
한국생산제조학회 학술발표대회 논문집
2016 .10
-
ZRO를 포함하는 MEMS gyroscope의 과도응답 모의해석
항공우주시스템공학회 학술행사 논문집
2018 .11
-
제어 모멘트 자이로의 운동 방정식
한국소음진동공학회 학술대회논문집
2018 .10
-
A Step Counting Method Using Piezoelectric Sensors
INTERNATIONAL CONFERENCE ON FUTURE INFORMATION & COMMUNICATION ENGINEERING
2016 .06
이 논문의 저자 정보
최근 본 자료
댓글(0)
0
UCI(KEPA) : I410-ECN-0101-2020-569-000093714