지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.23 No.4
- 발행연도
- 2014.7
- 수록면
- 179 - 186 (8page)
이용수
초록· 키워드
오류제보하기
Fluid model based numerical simulation was carried out for an inductively coupled plasma assisted sputter deposition system. Power absorption, electron temperature and density distribution was modeled with drift diffusion approximation. Effect of an electrically conducting substrate was analyzed and showed confined plasma below the substrate. Part of the plasma was leaked around the substrate edge. Comparison between the quasi-neutrality based compact model and Poisson equation resolved model showed more broadened profile in inductively coupled plasma power absorption than quasi-neutrality case, but very similar Ar ion number density profile. Electric potential was calculated to be in the range of 50 V between a Cr rod source and a conductive substrate. A new model including Cr sputtering by Ar+was developed and used in simulating Cr deposition process. Cr was modeled to be ionized by direct electron impact and showed narrower distribution than Ar ions.
목차
Ⅰ. Introduction
Ⅱ. Numerical model setup
Ⅲ. Simulation results and discussion
Ⅳ. Conclusion
References
참고문헌 (10)
참고문헌 신청
1. [학술지(정기간행물)] - J. Lee / 2003 / / Surf. Coat. Tech 169/170 : 353 ~
2. [학술지(정기간행물)] - W. Yang / 2012 / / Cur. Appl. Phys 12 : S99 ~
3. [학술대회논문] - S. Camphausen / 2008 / Society of Vacuum Coaters / 51st Annual Technical Conference Proceedings : 313 ~
4. [학술지(정기간행물)] - J. Lin / 2009 / / Thin Solid Films 518 : 1566 ~
5. [학술지(정기간행물)] - D.-K. Lee / 2003 / / Surf. Coat. Technol. 173/174 : 1234 ~
2. [학술지(정기간행물)] - W. Yang / 2012 / / Cur. Appl. Phys 12 : S99 ~
3. [학술대회논문] - S. Camphausen / 2008 / Society of Vacuum Coaters / 51st Annual Technical Conference Proceedings : 313 ~
4. [학술지(정기간행물)] - J. Lin / 2009 / / Thin Solid Films 518 : 1566 ~
5. [학술지(정기간행물)] - D.-K. Lee / 2003 / / Surf. Coat. Technol. 173/174 : 1234 ~
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UCI(KEPA) : I410-ECN-0101-2019-420-001275077