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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.24 No.5
- 발행연도
- 2015.9
- 수록면
- 142 - 150 (9page)
이용수
초록· 키워드
오류제보하기
A failure analysis of tungsten filaments used in quadrupole mass spectrometer for plasma process monitoring was carried by using SEM and EDS. Failed at high temperature, filaments showed two kinds of failure modes. The one is that diameter of filament became thinner gradually and finally snapped. The other is that filament abruptly snapped almost at a right angle. The EDS analysis showed Fe and C, including W and Fe, on the surface of failed filament. when failed filaments were treated with plasma in mixture of Ar and CF<SUB>4</SUB>, the amount of Fe and C decreased. The failure analysis of filament showed that the cause of filament failure is thermal evaporation and grain growth of tungsten at high temperature.
목차
I. Introduction
II. Experimental
III. Results
IV. Discussion
V. Conclusions
References
참고문헌 (22)
참고문헌 신청
[보고서] - W. D KLOPP / 1964 /
[보고서] - W. D KLOPP / 1966 /
[학술지(정기간행물)] - E. M. Savitskii / 1960 / / Metal Science and Heat Treatment of Metals 2 : 483 ~ 486
[학술지(정기간행물)] - A. Gilbert / 1966 / / Journal of the Less-Common Meatls 10 : 328 ~ 343
[학술지(정기간행물)] - Stefan Wurster / 2010 / / Int. Journal of Refractory Metals and Materials 28 : 692 ~ 697
[보고서] - W. D KLOPP / 1966 /
[학술지(정기간행물)] - E. M. Savitskii / 1960 / / Metal Science and Heat Treatment of Metals 2 : 483 ~ 486
[학술지(정기간행물)] - A. Gilbert / 1966 / / Journal of the Less-Common Meatls 10 : 328 ~ 343
[학술지(정기간행물)] - Stefan Wurster / 2010 / / Int. Journal of Refractory Metals and Materials 28 : 692 ~ 697
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UCI(KEPA) : I410-ECN-0101-2019-420-001275724