지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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An existing infrared (IR) analysis system is generally composed of infrared source, IR focusing lenses, IR detector, and optical chopper. An optical chopper is widely used in combination with lock-in amplifier to improve the signal-to-noise ratio by periodically interrupting incident light beam. During recent years, a few researches on miniaturized optical chopper have been reported to apply to microscaled optical systems. In this paper, a micro optical chopper operated by electromagnetic actuation is proposed and applied to a miniaturized micro-scaled optical system operating in IR spectral range. Additionally, the fabrication method of the proposed micro chopper is demonstrated. The proposed micro optical chopper is composed of the polydimethylsiloxane (PDMS) membrane, solenoid, and permanent magnet. The permanent magnet is bonded on the PDMS membrane using an ultraviolet-activated adhesive. The operation of the chopper is based on the attractive and repulsive forces between permanent magnet and solenoid induced by an electrical current flowing through the solenoid. The fabricated micro optical chopper could operate up to 200 Hz of frequency. The maximum operating distance of the chopper with 7mm diameter membrane was 750 μm at 100 Hz of frequency.
목차
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참고문헌 (15)
참고문헌 신청
C. N. Chen / 2012 / Fully quantitative characterization of CMOSMEMS polysilicon/titanium thermopile infrared sensors / Sens. Actuator B-Chem. 161 (1) : 892 ~ 900
D. H. B. Wicaksono / 2008 / Performance of miniaturized LPCVD-SiN membranebased 7-14 μm infrared thermal detector: Analytical, modeling, and experimental study / Sensors, 2008 IE
D. S. Tezcan / 2003 / A low-cost uncooled infrared microbolometer detector in standard CMOS technology / Electron Devices, IEEE Transactions on 50 (2) : 494 ~ 502
D. Takamuro / 2005 / Highly sensitive electron-emission-type infrared sensor using a single crystalline LiNb03 / Solid-State Sensors, Actuators and Microsystems, 2005. Digest of T
E. G. Camargo / 2007 / High-sensitivity temperature measurement with miniaturized InSb mid-IR sensor / IEEE Sens. J. 7 (9) : 1335 ~ 1339
D. H. B. Wicaksono / 2008 / Performance of miniaturized LPCVD-SiN membranebased 7-14 μm infrared thermal detector: Analytical, modeling, and experimental study / Sensors, 2008 IE
D. S. Tezcan / 2003 / A low-cost uncooled infrared microbolometer detector in standard CMOS technology / Electron Devices, IEEE Transactions on 50 (2) : 494 ~ 502
D. Takamuro / 2005 / Highly sensitive electron-emission-type infrared sensor using a single crystalline LiNb03 / Solid-State Sensors, Actuators and Microsystems, 2005. Digest of T
E. G. Camargo / 2007 / High-sensitivity temperature measurement with miniaturized InSb mid-IR sensor / IEEE Sens. J. 7 (9) : 1335 ~ 1339
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