지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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We present gas sensing performance based on 2X2 sensor array with four different elements (TiO2, SnO2, WO3 and In2O3 thin films) fabricated by rf sputter. Each thin film was deposited onto the selected SiO2/Si substrate with Pt interdigitated electrodes (IDEs) of 5 ㎛ spacing which were fabricated on a SiO2/Si substrate using photolithography and dry etching. For 5 ppm NO2 and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, 2X2 sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.
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참고문헌 (11)
참고문헌 신청
A. Kolmakov / 2005 / Enhanced gas sensing by individual SnO2nanowires and nanobelts functionalized with Pd catalyst particles / Nano Lett. 5 : 667 ~ 673
C. M. Hangarter / 2010 / Conducting polymer nanowires for chemiresistive and FET-based bio/chemical sensors / J. Mater. Chem. 20 : 3131 ~ 3140
C. W. Na / 2011 / Selective detection of NO2 and C2H5OH using a Co3O4-decorated ZnO nanowire network sensor / Chem. Commun. 47 : 5148 ~ 5150
G. Chen / 2012 / Enhanced gas sensing in pristine carbon nanotubes under continuous ultraviolet light illumination / Sci Rep 2 2 : 1 ~ 7
G. Korotcenkov / 2013 / Material Design for Metal Oxide Chemiresistive Gas Sensors / 센서학회지 22 (1) : 1 ~ 17
C. M. Hangarter / 2010 / Conducting polymer nanowires for chemiresistive and FET-based bio/chemical sensors / J. Mater. Chem. 20 : 3131 ~ 3140
C. W. Na / 2011 / Selective detection of NO2 and C2H5OH using a Co3O4-decorated ZnO nanowire network sensor / Chem. Commun. 47 : 5148 ~ 5150
G. Chen / 2012 / Enhanced gas sensing in pristine carbon nanotubes under continuous ultraviolet light illumination / Sci Rep 2 2 : 1 ~ 7
G. Korotcenkov / 2013 / Material Design for Metal Oxide Chemiresistive Gas Sensors / 센서학회지 22 (1) : 1 ~ 17
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