지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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Nickel oxide films using RF sputter was formed on the SiO2/Si substrate at the room temperature controlled with water circulation system. The feasibility of nickel oxide film as a bolometric material was demonstrated. GIXRD spectrum on NiO(111), NiO(200), and NiO(220) orientation expected as the main peaks were appeared in the grown nickel oxide films. The typical resistivity acquired at the RF power of 100W was about 34.25 Ω cm. And it was reduced to 18.65 Ω cm according to the increase of the RF power to 400W. The TCR of fabricated micro-bolometer with the resistivity of 34.25 Ω cm was -2.01 %/oC. The characteristics of fabricated nickel oxide film and micro-bolometer were analyzed with XRD pattern, resistivity, TCR, and SEM images.
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참고문헌 (14)
참고문헌 신청
D. Hwang / 2003 / Effects of RF power variation on properties of ZnO thin films and electrical properties of p-n homojunction / J. Cryst. Growth 254 : 449 ~ 455
D. S. Kim / 2012 / Surface treatment method for 1/f noise suppression in reactively sputtered nickel oxide film / J. Appl. Phys 112 : 24501 ~ 24504
H. L. Chen / 2005 / Characterization of sputtered NiO thin films / Surf. Coat. Technol 198 : 138 ~ 142
H. L. Chen / 2005 / Effect of film thickness on structural and electrical properties of sputter-deposited nickel oxide films / Mater. Trans 46 (4) : 872 ~ 879
H. L. Chen / 2008 / Effect of crystallographic orientations on electrical properties of sputter-deposited nickel oxide thin films / Thin Solid Films 516 : 5590 ~ 5596
D. S. Kim / 2012 / Surface treatment method for 1/f noise suppression in reactively sputtered nickel oxide film / J. Appl. Phys 112 : 24501 ~ 24504
H. L. Chen / 2005 / Characterization of sputtered NiO thin films / Surf. Coat. Technol 198 : 138 ~ 142
H. L. Chen / 2005 / Effect of film thickness on structural and electrical properties of sputter-deposited nickel oxide films / Mater. Trans 46 (4) : 872 ~ 879
H. L. Chen / 2008 / Effect of crystallographic orientations on electrical properties of sputter-deposited nickel oxide thin films / Thin Solid Films 516 : 5590 ~ 5596
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