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초록· 키워드
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High-sensitivity signal-to-noise ratio (SNR) microphones are essentially required for a broad range of automatic speech recognition applications. Piezoelectric microphones have several advantages compared to conventional capacitor micro- phones including high stiffness and high SNR. In this study, we designed a new piezoelectric membrane structure by using the finite elements method (FEM) and an optimization technique to improve the sensitivity of the transducer, which has ahigh-quality AlN piezoelectric thin film. The simulation demonstrated that the sensitivity critically depends on the innerradius of the top electrode, the outer radius of the membrane, and the thickness of the piezoelectric film in the microphone. The optimized piezoelectric transducer structure showed a much higher sensitivity than that of the conventional piezoelectric transducer structure. This study provides a visible path to realize micro-scale high-sensitivity piezoelectric microphones that have a simple manufacturing process, wide range of frequency and low DC bias voltage.
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참고문헌 (13)
참고문헌 신청
J. J. Neumann Jr / 2002 / CMOS-MEMS membrane for audio-frequency acoustic actuation / Sens. Actuat. A 95(2-3):175~182
S. Troiler-McKinstry / 2004 / Thin Film Piezoelectric for MEMS / J. Electroceram. 12(1-2):7~17
J. Bergqvist / 1993 / Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate / Sens. Actuat. A 39(3):191~200
S. B. Horowitz / 2012 / Effects of scaling and geometry on the performance of piezoelectric microphone / Sens. Actuat. A Phys. 185:24~32
J. Liu / 2015 / High-Temperature Dielectric Properties of Aluminum Nitride Ceramic for Wireless Passive Sensing Applications / Sensors 15(9):22660~22671
S. Troiler-McKinstry / 2004 / Thin Film Piezoelectric for MEMS / J. Electroceram. 12(1-2):7~17
J. Bergqvist / 1993 / Finite-element modeling and characterization of a silicon condenser microphone with a highly perforated backplate / Sens. Actuat. A 39(3):191~200
S. B. Horowitz / 2012 / Effects of scaling and geometry on the performance of piezoelectric microphone / Sens. Actuat. A Phys. 185:24~32
J. Liu / 2015 / High-Temperature Dielectric Properties of Aluminum Nitride Ceramic for Wireless Passive Sensing Applications / Sensors 15(9):22660~22671
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