지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
Abrasive blaster is similar to sand blaster, and effectively removes hard and brittle materials. Exiting abrasive blaster has applied to rough working such as deburring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro abrasive blaster was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro blaster in MEMS process of glass and succeed in domestically producing complete micro blaster. Diameter of hole and width of line in this etching is 100 ㎛ ~ 1000 ㎛. Experimental results showed good performance in micro channel and hole in glass wafer. Therefore, this micro blaster could be effectively applied to the micro machining of semiconductor, micro PCR chip.
목차
등록된 정보가 없습니다.
참고문헌 (14)
참고문헌 신청
F. H. in't veld / 1998 / Towards prediction of flux effects in powder blasting nozzles / Wear 215 : 131 ~ 136
G.G.P.van Gorkom / 1996 / Introduction to Zeus displays / Philips Journal of Research 50 (3) : 269 ~ 280
H. J. Ligthart / 1996 / Glass and glass machining in Zeus panels / Philips Journal of Research 50 (3) : 475 ~ 499
Henk Wensink / 2000 / High resolution powder blast micromaching / Proceedings of the IEEE Micro electro Mechanical Sustenus(MEMS) : 769 ~ 774
Henk Wensink / 2002 / A closer look at the ductile-brittle transition in solid particle erosion / Wear 253 : 1035 ~ 1043
G.G.P.van Gorkom / 1996 / Introduction to Zeus displays / Philips Journal of Research 50 (3) : 269 ~ 280
H. J. Ligthart / 1996 / Glass and glass machining in Zeus panels / Philips Journal of Research 50 (3) : 475 ~ 499
Henk Wensink / 2000 / High resolution powder blast micromaching / Proceedings of the IEEE Micro electro Mechanical Sustenus(MEMS) : 769 ~ 774
Henk Wensink / 2002 / A closer look at the ductile-brittle transition in solid particle erosion / Wear 253 : 1035 ~ 1043
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