지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
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In this study, pyramid structured black silicon process was developed in order to overcome disadvantages of using wet etching to texture the surface of single crystalline silicon and using grass/needle-like black silicon structure. In order to form the pyramidal black silicon structure on the silicon surface, the RIE system was modified to equip with metal-mesh on the top of head shower. The process conditions were : SF_6/O_2 gas flow 15/15 sccm, RF power of 200 W, pressure at 50 mTorr ~ 200 mTorr, and temperature at 5 ℃. The pressure did not affect the pyramid structure significantly. Increasing processing time increased the size of the pyramid, however, the size remained constant at 1 μm ~ 2 μm between 15 minutes ~ 20 minutes of processing. Pyramid structure of 1 μm in size showed to have the lowest reflectivity of 7 % ~ 10 %. Also, the pyramid structure black silicon is more appropriate than the grass/needle-like black silicon when creating solar cells.
목차
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참고문헌 (11)
참고문헌 신청
Henri Jansen / 1995 / The black silicom method H:The effect of mask material and loading on the reactive ion etching of deep silicon trenches / Microelectronic Engineering 27
Henri Jansen / 1995 / The black silicon method:a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etchin
Hsiao-Yen Chung / 2008 / Analysis of pyramidal surface texturization of silicon solar cells by molecular dynamics simulations / International Journal of Photoenergy 2008 : 1
J Yoo / 2008 / RIE texturing optimization for thin c-si solar cells in SF6/O2 plasma / Journal of physics d: applied physics 41 : 125 ~ 205
Jinsu Yoo / 2009 / Black surface structures for crystalline silicon solar cells / Materials Science and Engineering B : 333 ~ 337
Henri Jansen / 1995 / The black silicon method:a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etchin
Hsiao-Yen Chung / 2008 / Analysis of pyramidal surface texturization of silicon solar cells by molecular dynamics simulations / International Journal of Photoenergy 2008 : 1
J Yoo / 2008 / RIE texturing optimization for thin c-si solar cells in SF6/O2 plasma / Journal of physics d: applied physics 41 : 125 ~ 205
Jinsu Yoo / 2009 / Black surface structures for crystalline silicon solar cells / Materials Science and Engineering B : 333 ~ 337
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