지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
A thin-film multijunction thermal converter was fabricated through the process using 6 inch silicon wafer semiconductor
process and bulk micromachining. Evanohm R alloy and chromel-constantan were used as a heater and thermocouple
materials, respectively. The temperature coefficient of resistance of Evanohm R heater was about 75.12 ppm/oC and the
voltage sensitivity of the thermal converter indicated about 5.75 mV/mW in air. The transfer differences, measured by
FRDC-DC method in the frequency range from 20 Hz to 10 kHz, showed the value under about 1.36 ppm, 0.83 ppm for
the film thickness of 500, 200 nm, respectively. And in case of a 200 nm-thick thermal converter, the AC-DC transfer
differences seems to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz.
목차
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참고문헌 (13)
참고문헌 신청
/ / Accurate thin film multijunction thermal converter on a silicon chip 38 (2) : 335 ~ 337 1989
/ 1992. / Standards for AC-DC transfer 29 : 191 ~ 199
/ 1995 / Measuring thermoelectric effects in thermal converters with a fast reversed DC 44 (2) : 379 ~ 382
/ 1997 / Development of thin-film multijunction thermal converters at NIST 46 (2) : 347 ~ 351
/ 1998 / Micromachined Transducers Sourcebook : 77 ~ 83
/ 1992. / Standards for AC-DC transfer 29 : 191 ~ 199
/ 1995 / Measuring thermoelectric effects in thermal converters with a fast reversed DC 44 (2) : 379 ~ 382
/ 1997 / Development of thin-film multijunction thermal converters at NIST 46 (2) : 347 ~ 351
/ 1998 / Micromachined Transducers Sourcebook : 77 ~ 83
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