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지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
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초록· 키워드
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Piezoresistive type contact force sensor array is fabricated by (111) Silicon bulk micromachining for continuous blood pressure monitoring. Length and width of the unit sensor structure is 200 μm and 190 μm, respectively. The gap between sensing elements is only 10 μm. To achieve wafer level packaging, the sensor structure is capped by PDMS soft cap using wafer molding and bonding process with 10 μm alignment precision. The resistance change over contact force was measured to verify the feasibility of the proposed sensor scheme. The maximum measurement range and resolution is 900 mm Hg and 0.57 mm Hg, respectively.
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참고문헌 (7)
참고문헌 신청
/ / Apparatus for positioning transducer for blood pressure monitor / US Patent 4,987,900
Byung-Ho Jo / 2000 / Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer / Journal of Microelectromechanical Systems 9 (1) : 76 ~ 81
D. Kwak / 2003 / Why is (111) silicon a better mechanical material for MEMS: torsion case / 2003 ASME Int. Mech. Eng. Congress (IMECE 2003), Washington D.C., USA : 15 ~ 21
Jong-Ho Kim / 2005 / Design of flexible tactile sensor based on three-component force and its fabrication / Proceedings of the 2005 IEEE International Conference on Robotics and Au
K. Matthys / 2002 / Development and modeling of arterial applanation tonometry: A review / Technology and Health Care 10 : 65 ~ 76
Byung-Ho Jo / 2000 / Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer / Journal of Microelectromechanical Systems 9 (1) : 76 ~ 81
D. Kwak / 2003 / Why is (111) silicon a better mechanical material for MEMS: torsion case / 2003 ASME Int. Mech. Eng. Congress (IMECE 2003), Washington D.C., USA : 15 ~ 21
Jong-Ho Kim / 2005 / Design of flexible tactile sensor based on three-component force and its fabrication / Proceedings of the 2005 IEEE International Conference on Robotics and Au
K. Matthys / 2002 / Development and modeling of arterial applanation tonometry: A review / Technology and Health Care 10 : 65 ~ 76
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