지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
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This paper describes the design, fabrication and testing of a micromachined resonant accelerometer consisting of a symmetrical pair of proof masses and double-ended tuning fork(DETF) oscillators. Under the external acceleration along the input axis, the proof mass applies forces to the oscillators, which causes a change in their resonant frequency. This frequency change is measured to indicate the applied acceleration. Pivot anchor and leverage mechanisms are adopted in the accelerometer to generate larger force from a proof mass under certain acceleration, which enables increasing its scale factor. Finite element method analyses have been conducted to design the accelerometer and a silicon on insulator(SOI) wafer with a substrate glass wafer was used for fabricating it. The fabricated accelerometer has a scale factor of 188 Hz/g, which is shown to be in agreement with analysis results.
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참고문헌 (12)
참고문헌 신청
A. A. Seshia / 2002 / A vacuum packaged surface micromachined resonant accelerometer / J. Microelectromech. Syst. 11 (6) : 784 ~ 793
C. A. Choi / 1999 / Stress characteristics of multilayer polysilicon for the fabrication of micro resonators / J. Kor. Sensors Soc. 8 (1) : 53 ~ 62
L. He / 2008 / A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution / IEEE J. Solid-State Circuits 43 : 1480 ~ 1490
N. Barbour / 2001 / Inertial sensor technology trends / IEEE Sensors Journal 1 (4) : 332 ~ 339
N. Yazdi / 1998 / Micromachined inertial sensors / Proc. IEEE : 1640 ~ 1659
C. A. Choi / 1999 / Stress characteristics of multilayer polysilicon for the fabrication of micro resonators / J. Kor. Sensors Soc. 8 (1) : 53 ~ 62
L. He / 2008 / A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution / IEEE J. Solid-State Circuits 43 : 1480 ~ 1490
N. Barbour / 2001 / Inertial sensor technology trends / IEEE Sensors Journal 1 (4) : 332 ~ 339
N. Yazdi / 1998 / Micromachined inertial sensors / Proc. IEEE : 1640 ~ 1659
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