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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2011.1
- 수록면
- 57 - 65 (9page)
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Monitoring autocorrelated processes is prevalent in recent manufacturing environments. As a proactive control for manufacturing processes is emphasized especially in the semiconductor industry, it is natural to monitor real-time status of equipment through sensor rather than resultant output status of the processes. Equipment’s sensor data show various forms of correlation features.
Among them, considerable amount of sensor data, statistically autocorrelated, is well represented by Box-Jenkins autoregressive moving average (ARMA) model. In this paper, we present a design method of statistical process control (SPC) used for monitoring processes represented by the ARMA model. The proposed method shows benefits in the power of detecting process changes,and considers robustness to ARMA modeling errors simultaneously. We prove benefits through Monte carlo simulation-based investigations.
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참고문헌 (25)
참고문헌 신청
Alwan,L.C / 1988 / Time-Series Modeling for Statistical Process Control / Journal of Business and Economic Statistics 6 (1) : 87 ~ 95
Apley,D.W / 2002 / Time Series Control Charts in the Presence of Model Uncertainty / Journal of Manufacturing Science and Engineering 124 (4) : 891 ~ 898
Box,G / 2008 / Time Series Analysis, Forecasting and Control, 4th Edition / John Wiley and Sons, Inc.
English,J.R / 2000 / Detecting changes in autoregressive processes with X and EWMA charts / IIE Transactions 32 (12) : 1103 ~ 1113
Johnson,R.A / 1974 / The Effect of Serial Correlation on the Performance of CUSUM tests / Technometrics 16 (1) : 103 ~ 112
Apley,D.W / 2002 / Time Series Control Charts in the Presence of Model Uncertainty / Journal of Manufacturing Science and Engineering 124 (4) : 891 ~ 898
Box,G / 2008 / Time Series Analysis, Forecasting and Control, 4th Edition / John Wiley and Sons, Inc.
English,J.R / 2000 / Detecting changes in autoregressive processes with X and EWMA charts / IIE Transactions 32 (12) : 1103 ~ 1113
Johnson,R.A / 1974 / The Effect of Serial Correlation on the Performance of CUSUM tests / Technometrics 16 (1) : 103 ~ 112
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