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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
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This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE)and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.
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참고문헌 (6)
참고문헌 신청
G. Byrne / 1995 / Tool condition monitoring (TCM)-The status of research and industrial application / Annals of the CIRP 44 : 541 ~
G. Schropfer / 1998 / Lateral optical accelerometer micro -machined in (100) silicon with remote readout based on coherence modulation / Sensors and Actuators A 68 : 344 ~ 34
J. Marty / 1995 / Fiber-optic accelerometer using silicon micromachining techniques / Sensors and Actuators A 46 : 470 ~ 473
Jerzy W. Kalenik / 1998 / A cantilever opticalfiber accelerometer / Sensors and Actuators A 68 : 350 ~ 355
K. Ikuta / 1993 / Real three dimensional micro fabrication using stereolithography and metal molding / Proc. Of Mechanical system (MEMS93) : 42 ~ 47
G. Schropfer / 1998 / Lateral optical accelerometer micro -machined in (100) silicon with remote readout based on coherence modulation / Sensors and Actuators A 68 : 344 ~ 34
J. Marty / 1995 / Fiber-optic accelerometer using silicon micromachining techniques / Sensors and Actuators A 46 : 470 ~ 473
Jerzy W. Kalenik / 1998 / A cantilever opticalfiber accelerometer / Sensors and Actuators A 68 : 350 ~ 355
K. Ikuta / 1993 / Real three dimensional micro fabrication using stereolithography and metal molding / Proc. Of Mechanical system (MEMS93) : 42 ~ 47
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