지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2013.1
- 수록면
- 827 - 832 (6page)
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초록· 키워드
오류제보하기
Magnetostrictive actuator is fabricated with epoxy bonding method instead of sputtering method in this study. Fabrication process and experimental measurement method for magneto-mechanical characteristics is proposed. For the design of highly flexible magnetostrictive actuator, TbDyFe epoxy bonding with SU-8 substrate is adopted. The fabrication process for SU-8 substrate and the epoxy bonding is suggested and magnetostrictive behavior is investigated. Variable magnetic field is applied to measure the various magnetostrictive characteristics and magnetostriction is measured with different waves and different magnitude of magnetic field.
목차
등록된 정보가 없습니다.
참고문헌 (14)
참고문헌 신청
E. Orsier / 1996 / IC Compatible Contactless 2D Scanning Actuator based on Magnetostrictive Alloys / MECHATRONICS '96 Conference Proceedings 2 : 537 ~ 542
E. Quadt / 1996 / Magnetostrictive Thin Film Microflow Devices / Micro System Technology 96 : 451 ~ 457
E. Quandt / 1994 / Preparation and Applications of Magnetostrictive Thin Films / J. Appl. Phys 76 (10) : 7000 ~ 7002
E. Quandt / 2000 / Magnetostrictive Actuation in Microsystems / Sens. Act. A 81 : 275 ~ 280
F. Claeyssen / 1998 / Linear and Rotating Magnetostrictive Micromotors / Proceedings Actuators 98 : 375 ~ 381
E. Quadt / 1996 / Magnetostrictive Thin Film Microflow Devices / Micro System Technology 96 : 451 ~ 457
E. Quandt / 1994 / Preparation and Applications of Magnetostrictive Thin Films / J. Appl. Phys 76 (10) : 7000 ~ 7002
E. Quandt / 2000 / Magnetostrictive Actuation in Microsystems / Sens. Act. A 81 : 275 ~ 280
F. Claeyssen / 1998 / Linear and Rotating Magnetostrictive Micromotors / Proceedings Actuators 98 : 375 ~ 381
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