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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2013.1
- 수록면
- 31 - 36 (6page)
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초록· 키워드
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In this study, Mo metal powder was prepared by hydrogen reduction of Mo trioxides with different purity of 2N and 3N grades. We have obtained Mo metal powder with oxygen content of 1450 ppm by hydrogen reduction and subsequent heat treatment for degassing. Using the Mo metal powder, a low-oxygen Mo ingot was prepared by repetitive vacuum arc melting. The oxygen content of the obtained Mo ingot was less than 70 ppm after vacuum arc melting for 30 min. The purity of the Mo metal powder and the ingot was evaluated using glow discharge mass spectrometry. The purity of the respective Mo ingots was increased to 3N and 4N grades from the Mo powder of 2N and 3N grades after the repetitive vacuum arc melting. The low oxygen Mo ingot thus can be used as a raw material for sputtering targets.
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참고문헌 (9)
참고문헌 신청
Choi, G.-S. / 2009 / Preparation of 5N grade tantalum by electron beam melting / Journal of Alloys and Compounds 469 : 298 ~ 303
Juang, M. H. / 2006 / Formation of Mo gate electrode with adjustable work function on thin Ta2O5 high-k dielectric films / Solid-State Electronics 50 (2) : 114 ~ 118
Lee, B. -K. / 2013 / Preparation of Low-Oxygen Mo Ingot by Optimizing Hydrogen Reduction and Subsequent Melting from MoO3 / Materials Transactions 54 (2) : 238 ~ 241
Lim, J. -W. / 2010 / Hydrogen effect on refining of Mo metal by Ar?H2 plasma arc melting / Materials Letters 64 : 2290 ~ 2292
Mimura, K. / 1995 / Removal of alloying elements from zirconium alloys by hydrogen plasma-arc melting / Journal of Alloys and Compounds 221 : 267 ~ 273
Juang, M. H. / 2006 / Formation of Mo gate electrode with adjustable work function on thin Ta2O5 high-k dielectric films / Solid-State Electronics 50 (2) : 114 ~ 118
Lee, B. -K. / 2013 / Preparation of Low-Oxygen Mo Ingot by Optimizing Hydrogen Reduction and Subsequent Melting from MoO3 / Materials Transactions 54 (2) : 238 ~ 241
Lim, J. -W. / 2010 / Hydrogen effect on refining of Mo metal by Ar?H2 plasma arc melting / Materials Letters 64 : 2290 ~ 2292
Mimura, K. / 1995 / Removal of alloying elements from zirconium alloys by hydrogen plasma-arc melting / Journal of Alloys and Compounds 221 : 267 ~ 273
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